基于高温制备的氧化钙镁复合薄膜光电特性研究
发布时间：2019-05-06 06:04
【摘要】：采用电子束蒸镀工艺制备氧化钙掺杂氧化镁复合介质保护膜并深入分析了制备温度对该复合保护膜透过率及二次电子发射效率的影响。实验表明,高温制备能够使复合薄膜表面形貌更为致密,结晶粒径增加,薄膜的透过率和发光效率提高。当制备温度为300℃时,复合薄膜的形貌更为致密平整,裕度从25V增加到32V,发光效率从1.70lm/W提高到1.91lm/W,提高了12.35%。
[Abstract]:Calcium oxide doped magnesium oxide composite dielectric protective film was prepared by electron beam evaporation and the effect of preparation temperature on the transmittance and secondary electron emission efficiency of the composite protective film was analyzed. The experimental results show that the surface morphology of the composite films is denser, the crystal size is increased, and the transmittance and luminous efficiency of the composite films are improved by high temperature preparation. When the preparation temperature is 300 鈩，
本文编号：2469943
[Abstract]:Calcium oxide doped magnesium oxide composite dielectric protective film was prepared by electron beam evaporation and the effect of preparation temperature on the transmittance and secondary electron emission efficiency of the composite protective film was analyzed. The experimental results show that the surface morphology of the composite films is denser, the crystal size is increased, and the transmittance and luminous efficiency of the composite films are improved by high temperature preparation. When the preparation temperature is 300 鈩，
本文编号：2469943
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