Morphological and electrical properties of SrTiO 3 /TiO 2 /S

发布时间：2021-03-03 14:01

　　SrTiO₃（STO） and TiO₂ are insulating materials with large dielectric constants and opposite signs of the quadratic coefficient of voltage（α）. Insertion of a TiO₂ thin film between STO layers increases the linearity of the capacitance in response to an applied voltage, to meet the increasing demand of large-capacitance-density dynamic random access memory capacitors. Both STO and TiO₂ suffer from the problem of high leakage current owing to their almost ... 

【文章来源】：Chinese Physics B. 2017,26(01)

【文章页数】：4 页


本文编号：3061391