Thick c-BN films deposited by radio frequency magnetron sput

发布时间：2021-11-09 04:28

　　The excellent physical and chemical properties of cubic boron nitride（c-BN） film make it a promising candidate for various industry applications. However, the c-BN film thickness restricts its practical applications in many cases. Thus, it is indispensable to develop an economic, simple and environment-friend way to synthesize high-quality thick, stable c-BN films. High-cubic-content BN films are prepared on silicon（100） substrates by radio frequency（RF） magnetron sputtering from an h-BN target ... 

【文章来源】：Chinese Physics B. 2016,25(10)EISCI

【文章页数】：5 页


本文编号：3484622