一种三自由度空间全柔性并联机构的性能研究与优化设计

发布时间：2018-02-01 13:59

本文关键词： 并联机构柔性铰链静力分析模态分析 3-PSR-V 影响系数刚柔耦合仿真 MATLAB-SimMechanics仿真　出处：《浙江大学》2017年硕士论文　论文类型：学位论文

【摘要】：在机器人技术已经深入研究并被广泛应用的今天,并联机构做为机器人技术的一个重要分支也得到了很多学者的关注、研究并取得了丰硕的成果,并联机构以其独特的性能被广泛的应用于位姿调节装置中。尤其在精密位姿调节领域,并联机构结合微位移技术产生出巨大的应用价值。本文基于浸没式光刻机中浸没单元工作过程中位姿调节的需求,在对3自由度并联机构进一步研究的基础上,结合柔性铰链技术,设计出一种能实现空间3自由度位姿调节功能的空间全柔性铰链机构,并对其性能做了一定的探究。本文具体内容包括以下几个方面:1)应用机构运动影响系数理论,对三自由度并联机构3-PSR-V的速度分析、加速度分析、动力分析做了一定的探究,推导出了三自由度并联机构3-PSR-V相应构件的速度、加速度、移动副受力的表达式。2)基于工程实际需求,应用MATLAB对不同连杆尺寸下俯仰角Rx和侧翻角Ry的范围大小进行了详细的讨论并在此基础上确定了连杆的实际长度;建立了三自由度并联机构3-PSR-V的SimMechanics模型,应用简单的三自由度并联机构开环控制策略对SimMechanics模型进行了仿真,得到了三自由度并联机构3-PSR-V各运动副相关的运动参数变化曲线图和力学参数变化曲线图。3)基于直圆型柔性铰链的刚度模型,结合MATLAB仿真数据,计算出了柔性球副、柔性转动副、连杆的结构设计参数,设计出了包含柔性转动副、柔性球副、连杆等结构的柔性连杆;并通过ANSYS仿真分析,验证了全柔性连杆结构设计的合理性。4)基于工程实际需求,在柔性连杆设计的基础上,设计了类似于三自由度并联机构3-PSR-V的空间全柔性并联机构,并对其做了静力分析和模态分析;应用ADAMS分别对空间全柔性并联机构为多刚体和刚柔耦合两种系统时进行了动力学仿真,分析两种系统中的仿真结果表明,设计满足实际工程需求,并得出在小转角情况下,设计的空间全柔性并联机构可以等效为三自由度并联机构3-PSR-V的结论。5)基于静力分析和动力学分析的结果,加工出了三自由度空间全柔性并联机构验证样机,进行了验证实验,通过对实验数据处理并对比刚柔耦合仿真结果,得出了实验样机与设计比较符合,所设计的空间全柔性并联机构是合理的结论。
[Abstract]:Nowadays, the robot technology has been deeply studied and widely used. As an important branch of robot technology, parallel mechanism has also been paid attention by many scholars, and has achieved fruitful results. The parallel mechanism is widely used in the position and attitude adjustment devices for its unique performance, especially in the field of precision position and attitude adjustment. Parallel mechanism combined with micro-displacement technology has great application value. Based on the need of position and attitude adjustment in the working process of immersion unit in immersion lithography, this paper further studies the 3-DOF parallel mechanism. Based on the flexible hinge technology, a fully flexible spatial hinge mechanism is designed, which can adjust the position and attitude of three degrees of freedom in space. The specific contents of this paper include the following aspects: 1) apply the theory of kinematic influence coefficient to analyze the speed of 3-PSR-V of 3-DOF parallel mechanism. Acceleration analysis, dynamic analysis has made a certain exploration, deduced the 3-PSR-V parallel mechanism corresponding components of the speed, acceleration, moving pair force expression. 2) based on the actual engineering requirements. The range of pitch angle Rx and roll angle Ry under different connecting rod sizes is discussed in detail by using MATLAB and the actual length of connecting rod is determined on this basis. The SimMechanics model of 3-PSR-V parallel mechanism with three degrees of freedom is established. A simple open-loop control strategy of 3-DOF parallel mechanism is used to simulate the SimMechanics model. The stiffness model of 3-PSR-V parallel mechanism based on straight circular flexure hinge is obtained. Based on the simulation data of MATLAB, the structural design parameters of flexible ball pair, flexible rotation pair and connecting rod are calculated, and flexible connecting rod with flexible rotation pair, flexible ball pair and connecting rod is designed. And through the ANSYS simulation analysis, it is verified that the design of fully flexible connecting rod structure is reasonable. 4) based on the actual engineering requirements, on the basis of flexible connecting rod design. The spatial fully flexible parallel mechanism similar to 3-PSR-V is designed, and the static analysis and modal analysis are done. The dynamic simulation of space fully flexible parallel mechanism with multi-rigid body and rigid-flexible coupling is carried out by using ADAMS. The simulation results of the two systems show that the design meets the practical engineering requirements. It is concluded that the designed spatial fully flexible parallel mechanism can be equivalent to 3-PSR-V parallel mechanism with three degrees of freedom under the condition of small rotation angle. 5) based on the results of static analysis and dynamic analysis. A three-degree-of-freedom spatial fully flexible parallel mechanism verification prototype is processed and verified. By processing the experimental data and comparing the results of rigid-flexible coupling simulation, the experimental prototype is in good agreement with the design. The designed spatial fully flexible parallel mechanism is a reasonable conclusion.
【学位授予单位】：浙江大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TH112

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