基于MEMS工艺的微机械失效分析研究进展

发布时间：2018-02-17 01:40

本文关键词： 微电子机械系统(MEMS) 可靠性失效形式失效机理失效预防　出处：《半导体技术》2017年07期 　论文类型：期刊论文

【摘要】：随着微电子机械系统(MEMS)消费市场的不断增长,微器件的可靠性问题将是未来数年MEMS研究面临的新挑战。针对国内外近年来在微机械失效方面的主要研究内容,综述了基于MEMS工艺微机械的主要失效形式、失效机理和失效预防措施的最新研究成果和主要研究方法,着重总结了微机械的断裂、疲劳、磨损、黏附和蠕变等失效形式,并分析了这些失效形式对微器件的功能和性能的影响以及对这些失效的预防措施,通过结构优化、器件设计和加工质量控制等措施可降低失效的发生,提高可靠性。最后总结了微机械失效分析中存在的主要问题和以后的发展方向,提出建立通用的失效预测模型、标准的可靠性测试方法是未来微机械失效分析的研究重点。
[Abstract]:With the continuous growth of the consumer market of MEMS, the reliability of microdevices will be a new challenge in the next few years, aiming at the main research contents in the field of micromechanical failure at home and abroad in recent years. The main failure forms, failure mechanism and failure prevention measures of micromachineries based on MEMS process are reviewed in this paper. The failure modes of micromachineries such as fracture, fatigue, wear, adhesion and creep are emphatically summarized. The influence of these failure forms on the function and performance of microdevices and the preventive measures to these failures are analyzed. The failure can be reduced by structural optimization, device design and machining quality control. Finally, the main problems existing in the failure analysis of micromachineries and the future development direction are summarized, and a general failure prediction model is proposed. The standard reliability test method is the focus of the future research on the failure analysis of micromachineries.
【作者单位】：兰州城市学院石油工程学院;
【基金】：甘肃省自然科学基金资助项目(145RJZA085) 兰州城市学院博士科研启动基金资助项目(LZCU-BS2015-05)
【分类号】：TH-39

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