硅基MEMS器件的液体润滑及纳米磁性液体磁控润滑研究

发布时间：2018-03-10 05:21

  本文选题：MEMS器件　切入点：微观摩擦磨损实验装置　出处：《中国矿业大学》2015年博士论文　论文类型：学位论文

【摘要】：微机电系统(MEMS)器件的工作间隙尺度常处于纳米级,受尺寸效应的影响,作用在表面上的摩擦力和粘着力等相对于体积力而言要大很多,同时由于其运转速度高,因此相对于传统机械而言,摩擦问题显得更加突出。由于担心液体润滑剂本身的粘滞力会给MEMS器件的运行带来额外的阻力,目前对微机械表面的润滑主要采用薄膜润滑技术。为了研究液体润滑剂对硅基MEMS器件表面的润滑性能,本文设计了一种新型的微观摩擦磨损试验装置,并对硅基MEMS器件的液体润滑和纳米磁性液体磁控润滑进行了研究。为了实验研究硅基MEMS器件表面的微观摩擦特性,设计了一种基于销盘式摩擦副的微摩擦磨损试验测试装置,详细介绍了该装置的组成、工作原理及关键部件的设计。其中,利用MEMS平面弹簧实现微牛量级载荷的施加和测量,利用MEMS旋转弹性元件实现微牛米量级摩擦扭矩的测量,通过设计摩擦试件自适应结构使摩擦副的表面始终良好接触,借助润滑油池和润滑液自动补充装置保证摩擦副的良好供液,采用Lab VIEW上位机软件实现了测试数据的采集及处理。实验标定结果表明,该微观摩擦磨损试验台动态性能良好,载荷分辨率为0.08m N,摩擦力分辨率为0.024m N,能够满足MEMS器件微摩擦磨损的实验测试要求。根据摩檫学理论中Stribeck曲线三种润滑阶段的变化规律,确定了试验参数,利用上述微观摩擦磨损试验装置测试了液体润滑剂对硅基MEMS器件微观表面的润滑性能。实验研究了不同载荷条件,去离子水、十六烷、硅油和角鲨烷等不同粘度液体对硅基MEMS微观表面润滑性能的影响,通过测量不同相对滑动速度条件下的摩擦系数和两摩擦副表面间的油膜厚度,讨论了硅基MEMS器件表面的摩擦机理以及液体润滑特性。同时,基于表面织构技术在摩擦试件表面加工出不同表面纹理,结合实验测试和模拟仿真分析,讨论了表面纹理对MEMS器件微观表面液体润滑的影响。利用SEM表征了MEMS器件表面在混合摩擦阶段的微观磨损形貌,分析了液体润滑对MEMS器件的减摩特性。在理论分析纳米磁性液体粘磁特性的基础上,测试了外加磁场作用下纳米磁性液体的粘度变化规律。通过在微观摩擦磨损试验台上改造加装磁场装置,测试了不同磁场条件下纳米磁性液体对MEMS微观表面的润滑性能,利用SEM和XPS等表征手段分析了纳米磁性液体作为润滑剂时的润滑机理,探讨了纳米磁性液体对MEMS器件表面的磁控润滑性能。该论文有图120幅,表6个,参考文献175篇。
[Abstract]:The size of the working gap of MEMS / MEMS devices is usually at the nanometer level. Due to the effect of size effect, the friction and adhesion force acting on the surface is much larger than the volume force, and at the same time, because of its high speed, Therefore, the friction problem is more prominent than the traditional machinery, because of the worry that the viscous force of the liquid lubricant itself will bring extra resistance to the operation of the MEMS device. In order to study the lubricating performance of liquid lubricant on the surface of silicon based MEMS device, a new micro friction and wear test device is designed in this paper. The liquid lubrication of silicon based MEMS device and the magnetically controlled lubrication of nanometer magnetic liquid are studied. In order to study the micro friction characteristics of silicon based MEMS device, a micro friction and wear test device based on pin disk friction pair is designed. The composition, working principle and design of key components of the device are introduced in detail, in which the MEMS plane spring is used to implement the application and measurement of the micro cattle load, and the MEMS rotation elastic element is used to measure the friction torque of the micro cattle meter. By designing the adaptive structure of friction specimen, the surface of friction pair is always in good contact, and the good liquid supply of friction pair is ensured by means of lubricating oil pool and lubricating fluid automatic replenishing device. Lab VIEW software is used to collect and process the test data. The calibration results show that the dynamic performance of the micro friction and wear test rig is good. The load resolution is 0.08mN and the friction resolution is 0.024mN. it can meet the test requirements of micro-friction and wear of MEMS devices. According to the three lubricating stages of Stribeck curves in the theory of friction and sassafras, the test parameters are determined. The lubricating properties of liquid lubricant on the microcosmic surface of silicon-based MEMS devices were tested by using the micro friction and wear test apparatus mentioned above, and the effects of different loading conditions, such as deionized water, hexadecane, hexadecane, were studied. The effects of different viscosity liquids, such as silicone oil and squalane, on the lubricating properties of silicon-based MEMS microcosmic surfaces were studied. The friction coefficient and the oil film thickness between the surfaces of the two pairs were measured under different relative sliding velocities. The surface friction mechanism and liquid lubrication characteristics of silicon based MEMS devices are discussed. At the same time, different surface textures are fabricated on the surface of friction specimens based on surface texture technology, combined with experimental testing and simulation analysis. The effect of surface texture on the microcosmic surface liquid lubrication of MEMS devices was discussed. SEM was used to characterize the micro-wear morphology of MEMS devices during the mixed friction phase. The antifriction characteristics of liquid lubrication to MEMS devices are analyzed. Based on the theoretical analysis of the viscomagnetic properties of nanomagnetic liquids, The viscosity variation of nano-magnetic liquid under the action of external magnetic field was tested. The lubricating properties of nano-magnetic fluid on MEMS microcosmic surface under different magnetic fields were tested by retrofitting the magnetic field device on the micro-friction and wear test rig. The lubrication mechanism of nanometer magnetic liquid as lubricant was analyzed by means of SEM and XPS, and the magnetically controlled lubrication performance of nanometer magnetic liquid on the surface of MEMS device was discussed. There are 120 charts, 6 tables and 175 references in this paper.
【学位授予单位】：中国矿业大学
【学位级别】：博士
【学位授予年份】：2015
【分类号】：TH117.2
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本文编号：1591947