敞开式离子源和微型气泵集成的微型针-柱放电结构芯片设计与实验分析

发布时间：2018-03-23 23:37

本文选题：微型放电结构　切入点：电晕放电　出处：《光学精密工程》2017年06期

【摘要】：采用LIGA(Lithographie,Galvanoformung,Abformung)工艺设计加工了一种微型针-柱放电结构芯片,可实现敞开式离子源和微型气泵的系统集成。此微型放电结构由采用电镀铜加工而成的针电极、上圆柱电极和下圆柱电极组成,针-柱间距有1mm、2mm两种规格。在室温、大气压环境、无外界通入气流的条件下,通过在针-柱电极上加载负直流高压,可产生稳定的气体放电。利用风速计testo 405-V1测量芯片气体放电产生的离子风风速,结果表明针-柱间距为2mm时产生的离子风流速最大,可达0.79m/s。对针-柱间距2mm规格的微型芯片进行乙酸进样电离实验,当针-柱之间产生稳定的电晕放电后,可发现位于芯片出口处已被去离子水润湿的PH试纸变红。此时利用微弱电流检测系统采集电离产生的离子,当放电电压为-3300V时,通过微弱电流采集系统检测到的电流信号可达120pA。采用LTQ XL离子阱质谱仪,对芯片电离丙酮、无水乙醇和乙酸乙酯的离子产物进行检测,所得到的主要物质为质子化单体离子和二聚物离子。放电产生离子风风速以及乙酸的进样和电离实验表明,基于LIGA的微型针-柱结构芯片可实现大气压环境下敞开式离子源和微型气泵的双重功能。
[Abstract]:A miniature needle-column discharge structure chip was designed and manufactured by using Lithographie Lithographie Galvanoformungong Abformungong process, which can realize the system integration of open ion source and micro air pump. The micro discharge structure is made of needle electrode fabricated by electroplating copper. The upper cylinder electrode and the lower cylinder electrode are composed of two specifications, the needle to column distance of 1 mm and 2 mm. Under the condition of room temperature, atmospheric pressure and no air flow through the outside, negative DC high voltage is loaded on the needle column electrode. Testo 405-V1 is used to measure the ion wind velocity produced by the gas discharge of the chip. The results show that the ion wind velocity is the largest when the needle column spacing is 2mm. The sample ionization experiment of acetic acid was carried out on a microchip with needle to column spacing (2mm) specification. When a steady corona discharge occurred between the needles and columns, It can be found that the PH test paper, which has been wetted by deionized water at the outlet of the chip, turns red. At this time, the ionized ions are collected by the weak current detection system, and when the discharge voltage is -3300V, The current signal detected by the weak current acquisition system can reach 120 Pa. The ion products of the chip ionization of acetone, anhydrous ethanol and ethyl acetate were detected by LTQ XL ion trap mass spectrometer. The main materials obtained are protonated monomer ions and dimer ions. The micro needle-column chip based on LIGA can realize the dual functions of open ion source and micro air pump under atmospheric pressure.
【作者单位】：桂林电子科技大学生命与环境科学学院;广西信息科学实验中心;
【基金】：国家自然科学基金青年基金项目(No.61204120) 广西自然科学基金面上项目(No.2015GXNSFAA139304);广西自然科学基金青年基金项目(No.2013GXNSFBA019273) 国家级大学生创新项目(No.XY290406) 广西高等教育教学改革工程项目(No.2014GJB144) 广西自动检测技术与仪器重点实验室基金项目(No.YQ15114) 广西信息科学实验中心资助项目(No.YB1420) 桂林电子科技大学研究生教育创新计划资助项目(No.2017YJCX86) 广西物联网技术及产业化推进协同创新中心资助项目(No.WLW20060503,No.WLW20060504)
【分类号】：TH-39

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