光热微驱动机构动态响应特性的理论与实验研究

发布时间：2018-04-11 09:41

本文选题：光热膨胀 + 光热微驱动机构(OTMA)　；参考：《光电子·激光》2017年05期

【摘要】：理论和实验研究了脉冲激光照射下光热微驱动机构的动态响应特性,建立了微膨胀臂的光热温升及光热膨胀的动态模型,导出了动态光热膨胀伸长量及振幅的计算公式,并通过Matlab仿真得到它们与激光脉冲频率之间的理论关系曲线。设计与微加工制作了一种总长为700μm的非对称型光热微驱动机构(A-OTMA),在功率为2 mW、频率为2~18Hz可调的脉冲激光照射控制下开展了动态光热驱动实验。采用显微视频成像系统及运动测量软件,对A-OTMA光热微驱动过程进行了实时监测和测量。实验结果表明,A-OTMA能够以与激光脉冲相同的频率实现周期性偏转运动,光热偏转量及振幅随激光脉冲频率的增大而减小,其变化趋势与理论曲线吻合,获得的最大偏转量振幅为14.9μm(2 Hz时),最大响应频率至少达到18Hz。本文的动态响应特性的理论和实验研究,为OTMA在微光机电系统(MOEMS)及微纳米技术领域的实际应用提供了技术基础。
[Abstract]:The dynamic response characteristics of photothermal microactuators under pulsed laser irradiation are studied theoretically and experimentally. The dynamic models of photothermal temperature rise and photothermal expansion of micro-expansion arm are established, and the formulas for calculating the elongation and amplitude of dynamic photothermal expansion are derived.The theoretical relationship curves between them and the laser pulse frequency are obtained by Matlab simulation.An asymmetrical photothermal micro-drive mechanism with a total length of 700 渭 m was designed and fabricated. The dynamic photothermal driving experiment was carried out under the control of pulsed laser irradiation with power of 2 MW and adjustable frequency of 2~18Hz.The A-OTMA photothermal microactuation process is monitored and measured in real time by using micro video imaging system and motion measurement software.The experimental results show that A-OTMA can realize periodic deflection motion at the same frequency as laser pulse, and the photothermal deflection and amplitude decrease with the increase of laser pulse frequency, and the variation trend is consistent with the theoretical curve.The maximum deflection amplitude is 14.9 渭 m ~ 2 Hz and the maximum response frequency is at least 18 Hz.The theoretical and experimental study of the dynamic response characteristics in this paper provides a technical basis for the practical application of OTMA in the field of microoptic electromechanical systems (MOEs) and micronanotechnology.
【作者单位】：浙江大学现代光学仪器国家重点实验室;
【基金】：国家自然科学基金(51077117,61540019)资助项目
【分类号】：TH-39

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