基于液体粘着和压电振动辅助的微对象操作方法及实验研究

发布时间：2018-06-11 13:25

本文选题：靶球 + 粘着力　；参考：《天津工业大学》2017年硕士论文

【摘要】：微纳尺度对象是微机电系统中最广泛的操作目标,其特征尺寸主要介于毫米和纳米范围内的微小物体。随着微操作技术的不断拓展,使得对微操作的理论方法及技术研究提出了更高的挑战。当操作对象尺寸进入微尺度范围,由于存在尺度效应和表面效应等问题,这时微观粘着力(包括范德华作用力、静电力、毛细作用力等)便起到主导作用。为了实现100 μm尺度以下的微对象的操作转移,本文提出了基于毛细作用和压电振动辅助的微对象操作方法。分析了基于毛细力拾取及压电振动摩擦释放微对象的可行性,最后通过实验验证了该方法的可靠性。本文首先从微操作存在液体介质时的粘着机理出发,研究分析液体介质存在下微对象和工具以及微对象之间的粘着作用并对典型的粘着接触作用力模型进行分析。之后对拾取粘着模型进行数值仿真,分析相关参数对微对象拾取毛细力的影响大小,接着在微对象拾取粘着模型基础上建立了微观摩擦受力模型,并利用系统动力学建立了微对象的动态平衡方程。最后利用了 SIUMULINK工具对释放过程中的外力和特征距离进行仿真分析,得出合适的动态参数。最后依据微操作系统结构要求和微操作的方案策略,建立了基于毛细粘着作用以及振动摩擦作用的微对象操作实验平台。利用实验系统平台对所提出的拾取方法及释放方法进行了实验研究。针对模型仿真分析所涉及的相关参数进行了一系列的对比分析实验,重点对微对象释放操作过程开展了几组对比实验,最后确立了最优动态参数对微对象拾取及释放操作的影响规律,对实验数据做出统计并分析了该操作方法对微对象的释放成功率和精度。实验数据结果验证了所提的微对象操作转移方法能够顺利可靠的对微小对象进行拾取、转移和释放操作,具有较高的成功率和释放位移精度。本文所提的基于微液以及压电辅助作用的微对象操作方法研究对利用毛细粘着力和微观摩擦力作用进行微对象操作方面提供了一种新的思路和借鉴方法,为微操作技术的理论和实际应用方面提供了一些参考。
[Abstract]:Nanoscale objects are the most widely used targets in MEMS, and their characteristic sizes are mainly in the range of millimeters and nanometers. With the development of micromanipulation technology, the theoretical methods and techniques of micromanipulation are facing more challenges. When the size of the operating object enters the microscale range, the micro adhesion (including van der Waals force, electrostatic force, capillary force, etc.) plays a leading role due to the problems of scale effect and surface effect. In order to realize the operation transfer of microobjects below 100 渭 m, a new method based on capillary action and piezoelectric vibration is proposed in this paper. The feasibility of the micro object based on capillary force pickup and friction release from piezoelectric vibration is analyzed. Finally, the reliability of the method is verified by experiments. Based on the adhesion mechanism of micromanipulation in liquid medium, the adhesion between microobjects, tools and microobjects in liquid media is studied and the typical adhesive contact force model is analyzed in this paper. Then numerical simulation is carried out on the pickup adhesion model, and the influence of relevant parameters on the capillary force of the micro-object is analyzed. Then, the micro-friction force model is established on the basis of the micro-object pickup adhesion model. The dynamic equilibrium equation of micro object is established by using system dynamics. Finally, using SIUMULINK tool, the external force and characteristic distance in the process of release are simulated and analyzed, and the appropriate dynamic parameters are obtained. Finally, according to the structure requirements of the micro operating system and the scheme strategy of micro operation, the experimental platform of micro object operation based on capillary adhesion and vibration friction is established. The methods of pickup and release are studied with the platform of experimental system. A series of contrastive analysis experiments are carried out on the related parameters involved in the simulation analysis of the model, and several sets of comparative experiments are carried out on the microobject release operation process. Finally, the influence of the optimal dynamic parameters on the pickup and release operations of microobjects is established, the experimental data are statistically analyzed and the success rate and accuracy of the method are analyzed. The experimental results show that the proposed method can pick up, transfer and release small objects smoothly and reliably, and has a high success rate and release displacement accuracy. The research of microobject operation method based on microliquid and piezoelectric assisted action in this paper provides a new way of thinking and reference for microobject operation using capillary adhesion and micro friction. Some references are provided for the theoretical and practical application of micromanipulation technology.
【学位授予单位】：天津工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TH-39

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