微机械结构中考虑边界滑移的穿孔平板压膜阻尼分析

发布时间：2018-06-30 21:28

本文选题：压膜阻尼 + 穿孔　；参考：《北京理工大学学报》2017年06期

【摘要】：针对微机械结构中的穿孔平板提出了一种精简的压膜阻尼计算模型,计算时考虑了气体的稀薄效应和穿孔造成的压力损失及其内壁产生的气流剪切力.分析时将穿孔平板分解为多个压力分布相同的圆环板,通过修正的雷诺方程得到每个圆环板的压力分布.考虑边界滑移解释了气体的稀薄效应,根据气体的流量守恒给出了穿孔造成的压力损失.为了验证理论模型的正确性,分别与Kwok、Veijola的理论模型和Pasquale的实验结果进行了对比.结果表明本文给出的阻尼计算模型相对于Kwok给出的阻尼计算模型计算起来更准确,相对于Veijola给出的阻尼计算模型在精度相差不大的情况计算起来更方便.
[Abstract]:A simplified model for calculating the pressure film damping of perforated plates in micromachined structures is presented. The rarefied effect of gas and the pressure loss caused by perforation and the flow shear force caused by the inner wall are considered in the calculation. The perforated plate is decomposed into several annular plates with the same pressure distribution. The pressure distribution of each ring plate is obtained by the modified Reynolds equation. Considering the boundary slip, the rarefied effect of the gas is explained, and the pressure loss caused by the perforation is given according to the gas flow conservation. In order to verify the correctness of the theoretical model, it is compared with the theoretical model of Kwoku Veijola and the experimental results of Pasquale. The results show that the damping calculation model presented in this paper is more accurate than that given by Kwok, and is more convenient than that given by Veijola.
【作者单位】：北京理工大学爆炸科学与技术重点实验室;
【基金】：国家“八六三”计划项目(SS2013AA041104)
【分类号】：TH-39

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