基于光声机理的激光微驱动机构研究
发布时间：2018-08-12 20:27
【摘要】：微光机电系统(Micro-Opto-Electro-Mechanical System, MOEMS)的研究是进入21世纪以来极具活力的研究热点之一。其中,微纳米量级的小型马达或驱动机构是引领未来科技微型化、智能化、人机一体化的主导科技。随着激光技术的快速发展,将激光应用到对微型马达机构的驱动当中,实现从传统电磁马达到光动力微马达的转变,已成为世界各国学者重点关注的新型技术突破。本课题在充分了解当前各类型微驱动机构研究现状的基础上,利用现代激光技术,将纳秒级、小功率激光应用到微米量级马达的驱动研究当中,提出了一种通过激光诱导产生光声振动和光声表面波来实现驱动的新方法,设计研究了两种光声微驱动机构,即光声谐振微驱动机构(Photoacoustic Resonation Microactuator, PRMA)和光声表面波微驱动机构(Laser Surface Acoustic Wave Microactuator),具有非接触驱动与控制,便于小型化、集成化,响应快,输出效率高,结构简单,选材广泛等优点,是一种具有重要科学和科研价值的新型微驱动机构。本文首先分析了光声相互转化的基本原理,建立了物理和数学计算模型。针对纳米级超短脉冲激光源,创建了基于高斯函数的热源方程,推导了热传导方程和热弹性方程。针对光声谐振微驱动机构的研究,理论分析了光声谐振原理,设计了光声谐振基本作用单元,光声谐振臂。利用多物理场仿真分析软件COMSOL Multiphysics求解了光声谐振臂的共振频谱,得出相应的振动状态,仿真了热源能量、温度、形变三个关键参数的基本特性。在光声谐振臂的研究基础上,设计了带有储能单元的PRMA-1型、PRMA-2型谐振驱动机构,储能单元的设计使这两种机构能获得更大的振幅输出。进一步优化参数后,设计了PRMA-3型谐振驱动机构,实现了微型化、大振幅、快响应的MOEMS设计目标。基于同步辐射LIGA (Lithographe Galvanoformung Abformtechnik)技术和线切割技术制备了光声谐振驱动机构,并实验研究了其动态响应特性和驱动特性。使用电磁超声探测器(Electromagnetic acoustic transducer, EMAT)探测了振动曲线,对比了振幅输出能力；选择10μm量级的Si02微球和100μm量级的铜球作为驱动目标体,使用光学显微办法动态观测了驱动效果,讨论了四类谐振驱动机构的驱动能力。PRMA-3型机构无论是在微型化、振幅输出、响应速度还是驱动能力上都表现最优。利用光声效应产生的表面波,研究了光声表面波马达。其利用激光诱导的表面波在马达定子上的传播对目标动子进行驱动,搭建了表面波传播数学求解模型,仿真了激光诱导表面波的波动特性及传播样貌；从理论上分析了光声表面波马达在设计时应注意的问题,以保证最大程度提高马达驱动效率；设计了直线型、旋转型光声表面波马达,并基于此设计思想对环形表面波马达定子进行了理论仿真研究。使用激光可视化实验办法对表面波在环形马达定子上的传播特性进行了分析研究,得出马达定子的凹槽设计能保证表面波实现完整环形驱动。通过EMAT、 PZT探测手段定点研究了表面波在环形定子上的传播特性,从另一个角度验证了激光诱导表面波的环形驱动可行性。初步尝试了使用激光驱动微型齿轮,取得了一定成果。最后对本课题的研究成果进行了总结：提出了基于光声原理的激光微驱动机构的设计方案,建立了物理、数学计算模型,设计研究了光声谐振微驱动机构,研究了光声表面波马达。在文末展望中,提出了本课题尚存的待改进之处,并对今后的研究工作提出了设计和规划。
[Abstract]:Micro-Opto-Electro-Mechanical System (MOEMS) is one of the most active research hotspots since the beginning of the 21st century. Among them, micro-and nano-scale small motor or driving mechanism is the leading technology to lead the future technology of miniaturization, intellectualization and man-machine integration. It has become a new technological breakthrough that scholars all over the world pay close attention to the realization of the transformation from the traditional electromagnetic motor to the photodynamic micro-motor by using the driving of the micro-motor mechanism.On the basis of fully understanding the current research situation of various types of micro-drive mechanism,this subject uses modern laser technology to make nanosecond and low power laser response. A new method of driving a micro-motor by laser-induced photoacoustic vibration and photoacoustic surface wave is proposed. Two kinds of photoacoustic micro-actuators, photoacoustic Resonation Microactuator (PRMA) and photoacoustic surface wave micro-actuator (Las), are designed and studied. The Er Surface Acoustic Wave Microactuator is a new type of micro-actuator with the advantages of non-contact drive and control, easy miniaturization, integration, fast response, high output efficiency, simple structure and wide selection of materials. It is a new type of micro-actuator with important scientific and scientific value. The heat source equation based on Gauss function is established for nanometer ultrashort pulse laser source, and the heat conduction equation and thermoelastic equation are derived. The principle of photoacoustic resonance is theoretically analyzed for the study of photoacoustic resonant micro-drive mechanism, and the basic action unit of photoacoustic resonance, photoacoustic resonant arm, is designed. The analysis software COMSOL Multiphysics solves the resonance spectrum of the photoacoustic resonator arm and obtains the corresponding vibration state. The basic characteristics of the three key parameters of heat source energy, temperature and deformation are simulated. Based on the research of the photoacoustic resonator arm, the PRMA-1, PRMA-2 resonant driving mechanism with energy storage unit and the design of energy storage unit are designed. After further optimizing the parameters, a PRMA-3 resonant drive mechanism was designed to achieve the design goal of miniaturization, large amplitude and fast response. A photoacoustic resonant drive mechanism was fabricated based on synchrotron radiation LIGA (Lithographe Galvanoformung Abformtechnik) technology and wire cutting technology. The dynamic response and driving characteristics were studied. The vibration curves were detected by electromagnetic acoustic transducer (EMAT), and the amplitude output ability was compared. The Si02 microspheres of 10 micron magnitude and the copper microspheres of 100 micron magnitude were selected as the driving targets, and the driving effect was dynamically observed by optical microscopy. The driving ability of four types of resonant driving mechanism is discussed. The PRMA-3 mechanism is the best in miniaturization, amplitude output, response speed and driving ability. The surface wave motor is studied by using the surface wave produced by the photoacoustic effect. The target driver is driven by the laser-induced surface wave propagation on the motor stator. A mathematical model of surface wave propagation is built to simulate the wave characteristics and propagation patterns of laser-induced surface wave. The problems that should be paid attention to in the design of a photoacoustic surface wave motor are analyzed theoretically to ensure the maximum driving efficiency of the motor. The theoretical simulation of the stator of the ring surface wave motor is studied. The propagation characteristics of the surface wave on the stator of the ring motor are analyzed by means of the laser visualization experiment. It is concluded that the groove design of the motor stator can ensure the complete ring drive of the surface wave. The feasibility of laser-induced surface wave ring driving is verified by the propagation characteristics of the ring stator from another point of view. A preliminary attempt is made to use laser to drive micro-gears, and some achievements are achieved. Finally, the research results of this subject are summarized. A design scheme of laser micro-driving mechanism based on photoacoustic principle is proposed and established. Physical and mathematical calculation models are given. The photoacoustic resonant micro-drive mechanism is designed and studied. The photoacoustic surface wave motor is also studied. In the end of this paper, the problems to be improved are pointed out, and the design and planning for future research work are put forward.
【学位授予单位】：浙江大学
【学位级别】：博士
【学位授予年份】：2015
【分类号】：TH-39
[Abstract]:Micro-Opto-Electro-Mechanical System (MOEMS) is one of the most active research hotspots since the beginning of the 21st century. Among them, micro-and nano-scale small motor or driving mechanism is the leading technology to lead the future technology of miniaturization, intellectualization and man-machine integration. It has become a new technological breakthrough that scholars all over the world pay close attention to the realization of the transformation from the traditional electromagnetic motor to the photodynamic micro-motor by using the driving of the micro-motor mechanism.On the basis of fully understanding the current research situation of various types of micro-drive mechanism,this subject uses modern laser technology to make nanosecond and low power laser response. A new method of driving a micro-motor by laser-induced photoacoustic vibration and photoacoustic surface wave is proposed. Two kinds of photoacoustic micro-actuators, photoacoustic Resonation Microactuator (PRMA) and photoacoustic surface wave micro-actuator (Las), are designed and studied. The Er Surface Acoustic Wave Microactuator is a new type of micro-actuator with the advantages of non-contact drive and control, easy miniaturization, integration, fast response, high output efficiency, simple structure and wide selection of materials. It is a new type of micro-actuator with important scientific and scientific value. The heat source equation based on Gauss function is established for nanometer ultrashort pulse laser source, and the heat conduction equation and thermoelastic equation are derived. The principle of photoacoustic resonance is theoretically analyzed for the study of photoacoustic resonant micro-drive mechanism, and the basic action unit of photoacoustic resonance, photoacoustic resonant arm, is designed. The analysis software COMSOL Multiphysics solves the resonance spectrum of the photoacoustic resonator arm and obtains the corresponding vibration state. The basic characteristics of the three key parameters of heat source energy, temperature and deformation are simulated. Based on the research of the photoacoustic resonator arm, the PRMA-1, PRMA-2 resonant driving mechanism with energy storage unit and the design of energy storage unit are designed. After further optimizing the parameters, a PRMA-3 resonant drive mechanism was designed to achieve the design goal of miniaturization, large amplitude and fast response. A photoacoustic resonant drive mechanism was fabricated based on synchrotron radiation LIGA (Lithographe Galvanoformung Abformtechnik) technology and wire cutting technology. The dynamic response and driving characteristics were studied. The vibration curves were detected by electromagnetic acoustic transducer (EMAT), and the amplitude output ability was compared. The Si02 microspheres of 10 micron magnitude and the copper microspheres of 100 micron magnitude were selected as the driving targets, and the driving effect was dynamically observed by optical microscopy. The driving ability of four types of resonant driving mechanism is discussed. The PRMA-3 mechanism is the best in miniaturization, amplitude output, response speed and driving ability. The surface wave motor is studied by using the surface wave produced by the photoacoustic effect. The target driver is driven by the laser-induced surface wave propagation on the motor stator. A mathematical model of surface wave propagation is built to simulate the wave characteristics and propagation patterns of laser-induced surface wave. The problems that should be paid attention to in the design of a photoacoustic surface wave motor are analyzed theoretically to ensure the maximum driving efficiency of the motor. The theoretical simulation of the stator of the ring surface wave motor is studied. The propagation characteristics of the surface wave on the stator of the ring motor are analyzed by means of the laser visualization experiment. It is concluded that the groove design of the motor stator can ensure the complete ring drive of the surface wave. The feasibility of laser-induced surface wave ring driving is verified by the propagation characteristics of the ring stator from another point of view. A preliminary attempt is made to use laser to drive micro-gears, and some achievements are achieved. Finally, the research results of this subject are summarized. A design scheme of laser micro-driving mechanism based on photoacoustic principle is proposed and established. Physical and mathematical calculation models are given. The photoacoustic resonant micro-drive mechanism is designed and studied. The photoacoustic surface wave motor is also studied. In the end of this paper, the problems to be improved are pointed out, and the design and planning for future research work are put forward.
【学位授予单位】：浙江大学
【学位级别】：博士
【学位授予年份】：2015
【分类号】：TH-39
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