微纳机械谐振器能量耗散机理研究进展

发布时间：2018-09-08 14:30

【摘要】：微纳机械谐振器因其具有超高的谐振频率、品质因子和灵敏度等优越特性,在物理传感、生物与化学检测、射频通信、能量收集等方面表现出了卓越的性能而备受关注,已成为当前微/纳机电系统领域的研究重点和热点之一.能量耗散一直以来都是制约微纳机械谐振器性能提升与应用发展的瓶颈问题,且耗散机制具有多样性、不确定性和尺度相关性.本文综述了微纳机械谐振器中的能量耗散机理与非线性阻尼效应的研究进展,主要针对热弹性阻尼、声子相互作用、黏性阻尼、支撑损耗、表面与界面损耗等内禀和外部耗散机制进行了综述,阐明了不同能量耗散的产生机理及影响规律,可为降低能量损耗和结构优化设计、提高谐振器件的品质因子和动态性能提供参考,对微纳机械谐振器的设计、制造及应用发展具有重要意义.
[Abstract]:Micro-nano-mechanical resonators have attracted much attention because of their excellent characteristics such as super high resonant frequency, quality factor and sensitivity. They have shown excellent performance in physical sensing, biological and chemical detection, radio frequency communication, energy collection and so on It has become one of the research focuses and hot spots in the field of micro / nano electromechanical systems. Energy dissipation has always been a bottleneck problem that restricts the performance improvement and application development of micro-nano mechanical resonators, and the dissipative mechanism has diversity, uncertainty and scale correlation. In this paper, the research progress of energy dissipation mechanism and nonlinear damping effect in micro / nano mechanical resonators is reviewed, mainly for thermoelastic damping, phonon interaction, viscous damping, support loss, etc. The intrinsic and external dissipation mechanisms such as surface and interface losses are reviewed. The mechanism of different energy dissipation and its influence law are expounded, which can be used to reduce the energy loss and optimize the structure design. Improving the quality factor and dynamic performance of resonant devices is of great significance to the design, manufacture and application of micro-nano mechanical resonators.
【作者单位】：上海交通大学机械与动力工程学院机械系统与振动国家重点实验室;
【基金】：国家优秀青年科学基金(11322215) 霍英东青年教师基金(141050) 中组部青年拔尖人才计划资助
【分类号】：TH-39

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