光控微镜用PLZT陶瓷执行器的驱动与控制研究
发布时间：2018-12-30 21:04
【摘要】：MOEMS微镜的驱动装置是其核心部件,通过不同的微镜驱动装置可以实现对入射光强度和相位的调制以及光路的选通。目前主要有压电驱动、电磁驱动、电热驱动和静电驱动等驱动方式。这些驱动方式均需要导线连接、电磁激励源,容易引入电磁干扰,并且无法在独立环境中工作,因此开展利用镧改性锆钛酸铅(PLZT)陶瓷驱动的光控微镜及其驱动控制策略的研究具有重要的意义。与传统微镜驱动方式相比,PLZT陶瓷驱动的光控微镜无需电磁激励源,具有非接触远程光控、无线能量传输、无电磁干扰、驱动清洁等优点,适于洁净操作空间及真空等独立工作环境下的远程非接触操作。本文旨在利用PLZT陶瓷的光致特性实现对微镜装置的非接触式闭环控制,分别针对PLZT陶瓷在微镜平移和旋转机构中的应用设计了新型的驱动机构,并基于PLZT陶瓷的多物理场耦合模型对所提出的驱动机构的闭环伺服控制进行理论建模、仿真分析与实验验证,为光致伸缩智能材料在微驱动工程领域的应用提供理论依据。对PLZT陶瓷在高能紫外光照射下的反常光生伏特效应、热释电效应、压电效应机理进行分析的基础上,阐述了 PLZT陶瓷多物理场耦合关系,并建立了 PLZT陶瓷光照阶段与光停阶段的多物理场耦合数学模型。通过对光控微镜各组成结构的选型进行分析与讨论,确定了光控微镜的整体设计方案。对微镜平移机构的刚度、实际位移放大倍数、固有频率等进行分析,基于分析结果确定了相关尺寸参数,并利用有限元对微镜平移机构进行了力学分析;推导了光电-静电复合驱动旋转机构的旋转角度,并分析了旋转角度与PLZT陶瓷光生电压之间的关系。基于PLZT陶瓷的多物理场耦合模型,分别推导PLZT陶瓷光致微位移闭环控制、PLZT/PVDF层合悬臂梁复合驱动机构挠度闭环控制以及PLZT陶瓷光生电压闭环控制理论模型。并利用ON-OFF控制策略,在Matlab软件中对所提出驱动机构进行数值仿真分析。仿真结果表明,通过对PLZT陶瓷以及基于PLZT陶瓷的新型复合驱动机构实施ON-OFF控制策略,能够实现对光控微镜驱动装置的闭环伺服控制。分别针对PLZT陶瓷的光致微位移闭环伺服控制、PLZT/PVDF层合悬臂梁复合驱动机构的挠度闭环控制以及PLZT陶瓷的光生电压闭环控制开展了实验研究。实验结果表明,单片式PLZT陶瓷的光致形变和光生电压可以通过ON-OFF控制策略实现较高精度的动态控制,PLZT/PVDF层合悬臂梁复合驱动机构可以获得较大的输出位移,从而验证了本文所提出的控制策略的有效性,证实了新型光控复合驱动方式的可行性。
[Abstract]:The driving device of MOEMS micromirror is its core component. The intensity and phase of incident light can be modulated and the optical path can be switched by different driving devices of micromirror. At present, there are piezoelectric drive, electromagnetic drive, electrothermal drive and electrostatic drive and other driving methods. All of these drives require wire connections, electromagnetic excitation sources, easy introduction of electromagnetic interference, and inability to work in an independent environment. Therefore, it is of great significance to study the light-controlled micromirror driven by lanthanum modified lead zirconate titanate (PLZT) ceramics and its driving control strategy. Compared with the traditional driving mode of micromirror, PLZT ceramic driven light-controlled micromirror has the advantages of non-contact remote optical control, wireless energy transmission, no electromagnetic interference, clean driving and so on. Suitable for remote non-contact operation in clean operating space and vacuum. The purpose of this paper is to realize the non-contact closed-loop control of micromirror devices by using the photoinduced characteristics of PLZT ceramics. A new type of driving mechanism is designed for the applications of PLZT ceramics in the micromirror translation and rotation mechanisms, respectively. Based on the multi-physical field coupling model of PLZT ceramics, the closed-loop servo control of the driving mechanism is theoretically modeled, simulated and verified by experiments, which provides a theoretical basis for the application of photostrictive smart materials in the field of micro-drive engineering. Based on the analysis of anomalous photovolt effect, pyroelectric effect and piezoelectric effect mechanism of PLZT ceramics irradiated by high energy ultraviolet light, the coupling relationship of PLZT ceramics with multiple physical fields is described. The multi-physical field coupling mathematical model of PLZT ceramics during illumination and light stoppage is established. Based on the analysis and discussion of the structure selection of the light-controlled micromirror, the overall design scheme of the light-controlled micromirror is determined. The stiffness, the actual displacement magnification and the natural frequency of the micromirror translation mechanism are analyzed. Based on the analysis results, the relevant dimension parameters are determined, and the mechanical analysis of the micro mirror translation mechanism is carried out by using the finite element method. The rotation angle of optoelectronic electrostatic compound drive rotating mechanism is deduced, and the relationship between rotation angle and photogenerated voltage of PLZT ceramics is analyzed. Based on the multi-physical field coupling model of PLZT ceramics, the theoretical models of PLZT ceramic photoinduced micro-displacement closed-loop control, PLZT/PVDF laminated cantilever composite driving mechanism deflection closed-loop control and PLZT ceramics photogenerated voltage closed-loop control are derived respectively. Using ON-OFF control strategy, numerical simulation analysis of the proposed drive mechanism is carried out in Matlab software. The simulation results show that the closed-loop servo control of the light-controlled micromirror drive device can be realized by implementing the ON-OFF control strategy for the PLZT ceramics and the new compound drive mechanism based on PLZT ceramics. In this paper, the photoinduced micro-displacement closed-loop servo control of PLZT ceramics, the deflection closed-loop control of PLZT/PVDF laminated cantilever composite drive mechanism and the photovoltage closed-loop control of PLZT ceramics are studied. The experimental results show that the photoinduced deformation and photogenerated voltage of monolithic PLZT ceramics can be controlled dynamically by ON-OFF control strategy, and the PLZT/PVDF laminated cantilever composite drive mechanism can obtain larger output displacement. The effectiveness of the proposed control strategy is verified, and the feasibility of the new optically controlled compound drive is verified.
【学位授予单位】：南京理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TH-39
本文编号：2396142
[Abstract]:The driving device of MOEMS micromirror is its core component. The intensity and phase of incident light can be modulated and the optical path can be switched by different driving devices of micromirror. At present, there are piezoelectric drive, electromagnetic drive, electrothermal drive and electrostatic drive and other driving methods. All of these drives require wire connections, electromagnetic excitation sources, easy introduction of electromagnetic interference, and inability to work in an independent environment. Therefore, it is of great significance to study the light-controlled micromirror driven by lanthanum modified lead zirconate titanate (PLZT) ceramics and its driving control strategy. Compared with the traditional driving mode of micromirror, PLZT ceramic driven light-controlled micromirror has the advantages of non-contact remote optical control, wireless energy transmission, no electromagnetic interference, clean driving and so on. Suitable for remote non-contact operation in clean operating space and vacuum. The purpose of this paper is to realize the non-contact closed-loop control of micromirror devices by using the photoinduced characteristics of PLZT ceramics. A new type of driving mechanism is designed for the applications of PLZT ceramics in the micromirror translation and rotation mechanisms, respectively. Based on the multi-physical field coupling model of PLZT ceramics, the closed-loop servo control of the driving mechanism is theoretically modeled, simulated and verified by experiments, which provides a theoretical basis for the application of photostrictive smart materials in the field of micro-drive engineering. Based on the analysis of anomalous photovolt effect, pyroelectric effect and piezoelectric effect mechanism of PLZT ceramics irradiated by high energy ultraviolet light, the coupling relationship of PLZT ceramics with multiple physical fields is described. The multi-physical field coupling mathematical model of PLZT ceramics during illumination and light stoppage is established. Based on the analysis and discussion of the structure selection of the light-controlled micromirror, the overall design scheme of the light-controlled micromirror is determined. The stiffness, the actual displacement magnification and the natural frequency of the micromirror translation mechanism are analyzed. Based on the analysis results, the relevant dimension parameters are determined, and the mechanical analysis of the micro mirror translation mechanism is carried out by using the finite element method. The rotation angle of optoelectronic electrostatic compound drive rotating mechanism is deduced, and the relationship between rotation angle and photogenerated voltage of PLZT ceramics is analyzed. Based on the multi-physical field coupling model of PLZT ceramics, the theoretical models of PLZT ceramic photoinduced micro-displacement closed-loop control, PLZT/PVDF laminated cantilever composite driving mechanism deflection closed-loop control and PLZT ceramics photogenerated voltage closed-loop control are derived respectively. Using ON-OFF control strategy, numerical simulation analysis of the proposed drive mechanism is carried out in Matlab software. The simulation results show that the closed-loop servo control of the light-controlled micromirror drive device can be realized by implementing the ON-OFF control strategy for the PLZT ceramics and the new compound drive mechanism based on PLZT ceramics. In this paper, the photoinduced micro-displacement closed-loop servo control of PLZT ceramics, the deflection closed-loop control of PLZT/PVDF laminated cantilever composite drive mechanism and the photovoltage closed-loop control of PLZT ceramics are studied. The experimental results show that the photoinduced deformation and photogenerated voltage of monolithic PLZT ceramics can be controlled dynamically by ON-OFF control strategy, and the PLZT/PVDF laminated cantilever composite drive mechanism can obtain larger output displacement. The effectiveness of the proposed control strategy is verified, and the feasibility of the new optically controlled compound drive is verified.
【学位授予单位】：南京理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TH-39
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