三轴向振动台运动耦合装置的参数优化

发布时间：2019-03-09 20:46

【摘要】：通过建立三轴向振动台运动耦合装置的传递模型,根据需求频率范围合理选择运动耦合装置刚度。采用有限元方法求解气体润滑问题,仿真分析了供气压力和气膜厚度对气体静压轴承刚度的影响。结果表明,气体静压轴承的刚度随着供气压力的增大而增大,在特定的供气压力下存在一个使气体静压轴承的刚度取得极值的气膜厚度极值点。在此基础上,优化得到一组满足运动耦合装置传递特性要求的供气压力和气膜厚度参数,并通过原理样机进行了验证。实验结果表明,优化得出的运动耦合装置参数满足传递特性要求。
[Abstract]:By establishing the transfer model of the motion coupling device of the triaxial vibration table, the stiffness of the motion coupling device is reasonably selected according to the demand frequency range. The finite element method is used to solve the problem of gas lubrication. The effects of gas supply pressure and film thickness on the stiffness of aerostatic bearing are simulated and analyzed. The results show that the stiffness of the aerostatic bearing increases with the increase of the gas supply pressure, and there is an extreme point of gas film thickness which makes the stiffness of the aerostatic bearing reach the extreme value under the specific gas supply pressure. On this basis, a set of gas supply pressure and film thickness parameters which meet the requirements of the transmission characteristics of the motion coupling device are optimized, and verified by the principle prototype. The experimental results show that the parameters of the optimized motion coupling device meet the requirements of transmission characteristics.
【作者单位】：中国计量科学研究院力学与声学计量科学研究所;
【基金】：国家自然科学基金青年基金资助项目(51605461) 中国博士后科学基金资助项目(2016M591229) 质检公益性行业科研专项资助项目(201410009)
【分类号】：TH133.36

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