SEM下纳米操作分子动力学仿真及探针闭环控制方法研究

发布时间：2018-01-30 16:19

本文关键词： 纳米操作分子动力学仿真 BP神经网络 PID控制　出处：《哈尔滨理工大学》2015年硕士论文　论文类型：学位论文

【摘要】：纳米操作是纳米技术的重要研究内容，是微/纳制造科学与技术研究的重要内容之一，是国际机器人学和纳米科技领域受到广泛关注的热点研究领域。纳米操作系统在微/纳米尺度材料研究和器件制造过程中发挥着日益重要的作用。高效、可靠、稳定的纳米操作系统在光电、信息存储、生物医疗等领域具有广阔的应用前景。本文针对SEM下的纳米线平移操作过程进行研究。为了稳定可靠的控制纳米线的平移过程，对纳米构件间的交互作用力进行了建模分析；为了提高探针的定位精度，，引入了BP神经网络PID控制算法对探针进行闭环控制。在对微纳米操作理论分析的基础上，建立了纳米操作过程中的纳米构件间的相互作用力模型。对纳米线平移操作过程中可能出现的旋转和弯曲现象进行了理论分析，并提出了采用Z型操作策略平移纳米线。采用LAMMPS分子动力学仿真软件，建立了纳米线平移操作过程的分子动力学模型。并将得出的数据导入VMD可视化软件中，对纳米线平移操作过程中的纳米线运动轨迹以及其微观物理现象进行了直观的观测，并验证Z型操作策略的可行性。建立压电陶瓷驱动的纳米定位操作系统的模型，采用BP神经网络PID控制算法对探针定位系统进行闭环控制。建立BP神经网络PID控制器的Simulink仿真模型，通过分析仿真结果，得出本文所设计的BP神经网络PID控制器能够有效的减小系统的跟踪误差，提高系统的跟踪精度，改善系统的控制性能。
[Abstract]:Nano-operation is an important research content of nanotechnology and one of the important contents of micro / nano manufacturing science and technology. Nano operating system plays an increasingly important role in the research of micro / nano scale materials and devices. It is highly efficient and reliable. Stable nanoscale operating system in optoelectronic, information storage. Biomedicine and other fields have broad application prospects. In this paper, the SEM nanowire translation operation process is studied. In order to control the translation process of nanowires stably and reliably. The interaction forces between nanostructures are modeled and analyzed. In order to improve the accuracy of the probe, a BP neural network PID control algorithm is introduced to control the probe. Based on the theoretical analysis of micro and nano operation. The interaction force model of nanoscale components during nanoscale operation is established, and the phenomena of rotation and bending in the process of nanowire translation are analyzed theoretically. A Z-type operation strategy is proposed to translate the nanowires. Using LAMMPS molecular dynamics simulation software, the molecular dynamics model of nanowire translation operation is established, and the obtained data is imported into VMD visualization software. The trajectory of nanowire motion and its microphysical phenomena in the process of nanowire translation are observed intuitively, and the feasibility of Z-type operation strategy is verified. The model of piezoelectric ceramic driven nano-positioning operating system is established. BP neural network PID control algorithm is used to control the probe positioning system. The Simulink simulation model of BP neural network PID controller is established and the simulation results are analyzed. It is concluded that the BP neural network PID controller designed in this paper can effectively reduce the tracking error of the system, improve the tracking accuracy of the system and improve the control performance of the system.
【学位授予单位】：哈尔滨理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.1;TP273

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