硬质多元氮化物薄膜研究进展

发布时间：2018-03-18 08:11

本文选题：硬质多元氮化物薄膜　切入点：组织结构　出处：《表面技术》2017年06期 　论文类型：期刊论文

【摘要】：综述了硬质多元氮化物薄膜的研究进展,主要是从硬质薄膜的发展历程上,介绍了每一代薄膜的产生及其特点。同时介绍了硬质多元氮化物薄膜的结构及其性能特点。着重从如何提高薄膜硬度和韧性方面进行了详细介绍,对几种硬化机制进行了论述,包括晶粒细化、晶界强化、固溶强化及离子轰击/应力硬化。同时还介绍了提高薄膜韧性的方法,包括引入一个韧性相(包括金属相)、利用相变韧化、引入压应力韧化、优化涂层结构等。同时还指出,硬度和韧性都是硬质薄膜获得实际应用的重要指标。单纯追求高硬度或高韧性是不可取的,因为硬质薄膜一般脆性较大,而韧性好的薄膜却缺乏足够的硬度。从工程应用的角度来说,既要得到较高的硬度,而且韧性不能损失太多。最后指出,今后的发展方向要将硬化和韧性的研究集中在纳米尺度上,即如何在纳米尺度上进一步理解薄膜的变形。
[Abstract]:The research progress of hard multicomponent nitride films is reviewed, which is mainly based on the development of hard films. The generation and characteristics of each generation of films are introduced. The structure and properties of hard multicomponent nitride films are also introduced. The hardness and toughness of hard multicomponent nitride films are introduced in detail, and several hardening mechanisms are discussed. It includes grain refinement, grain boundary strengthening, solid solution strengthening and ion bombardment / stress hardening. At the same time, the methods to improve the toughness of thin films are introduced, including the introduction of a ductile phase (including metal phase), toughening by phase transformation, and compression stress toughening. At the same time, it is pointed out that both hardness and toughness are important indicators for the practical application of hard films. It is not advisable to pursue high hardness or high toughness simply because hard films are generally more brittle. But the film with good toughness lacks enough hardness. From the point of view of engineering application, it is necessary to obtain higher hardness, and the toughness should not be lost too much. Finally, it is pointed out, In the future, the research on hardening and toughness should be focused on the nanometer scale, that is, how to further understand the deformation of the film on the nanometer scale.
【作者单位】：中国科学院金属研究所;中国石油天然气股份有限公司吉林石化分公司乙烯厂;深圳职业技术学院;
【基金】：国家自然科学基金资助项目(51401128)~~
【分类号】：TB383.2

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