磁电复合薄膜用压电材料及靶材研究

发布时间：2018-04-10 03:19

本文选题：磁电复合薄膜　切入点：靶材制备　出处：《华中科技大学》2015年硕士论文

【摘要】：磁电复合薄膜能够实现电能与磁能的转换,是目前功能材料领域的研究热点。压电薄膜是磁电复合薄膜的重要组成部分,应用磁控溅射法制备的压电陶瓷薄膜与溅射靶材的质量关系密切。因此,研究压电性能可调控的压电陶瓷靶材,对压电薄膜以及磁电复合薄膜的研制具有非常重要的意义。本文以xBi(Mg1/2Ti1/2)O3-(1-x)PbTiO3(BMT-PT)体系和Pb(Zr0.54Ti0.46)O3(PZT)体系压电陶瓷为基础,研究了一系列压电系数在150到600pC/N之间的陶瓷靶材配方。首先,讨论了Sr,La离子对BMT-PT陶瓷的性能影响。研究表明,当BMT的含量x=0.68时,BMT-PT压电陶瓷处于准同型相界位置。Sr,La离子的少量取代对陶瓷的压电性能影响不大,但过量的Sr会降低压电陶瓷的压电性能。La离子的掺杂能够显著提高BMT-PT压电陶瓷的压电性能,当La2O3的掺杂量为0.02%wt时,压电陶瓷的压电系数取得了极大值。其次,研究了Sr离子掺杂对PZT压电陶瓷性能的影响,随着Sr含量的增大,压电陶瓷的压电系数先增大后减小,当Sr的含量为7%mol时,压电陶瓷的压电系数达到极值。当在PZT中加入过量Pb时,压电陶瓷的压电性能得到了进一步提高。本文采用固相烧结法研制了PZT压电陶瓷靶材。实验表明,PZT压电陶瓷样品的径向烧成收缩率为14%,根据收缩率设计了靶材模具。为了提高靶材的致密性和均匀性,采用冷等静压法压制坯体。通过热重分析和烧结试验确定了制作靶材的烧结温度、成型压力等参数。最终获得了相对密度为94.6%的压电陶瓷靶材,靶材形成了纯净单一的钙钛矿相,晶粒大小均匀,晶界清晰,基本满足使用要求。
[Abstract]:The magnetoelectric composite film can realize the conversion between electric energy and magnetic energy, which is the research hotspot in the field of functional materials.Piezoelectric film is an important part of magnetoelectric composite film. The piezoelectric film prepared by magnetron sputtering has a close relationship with the quality of sputtering target.Therefore, the study of piezoelectric ceramic targets with adjustable piezoelectric properties is of great significance to the development of piezoelectric films and magnetoelectric composite films.In this paper, a series of ceramic target formulations with piezoelectric coefficients between 150 and 600pC/N have been studied on the basis of the piezoelectric ceramics of xBi-Mg1 / 2Ti1 / 2Ti3- (1-xPbTiO3BT-PTT) system and PbBZr0.54Ti0.46Ti0.46O3PZTsystem.Firstly, the effect of La ~ (2 +) on the properties of BMT-PT ceramics was discussed.The results show that when the content of BMT is 0.68, there is little effect on the piezoelectric properties of BMT-PT piezoelectric ceramics in the position of quasi-homogenous phase boundary.However, excessive Sr can decrease the piezoelectric properties of piezoelectric ceramics. La ion doping can significantly improve the piezoelectric properties of BMT-PT piezoelectric ceramics. When the doping amount of La2O3 is 0.02%wt, the piezoelectric coefficient of piezoelectric ceramics reaches the maximum value.Secondly, the effect of Sr doping on the properties of PZT piezoelectric ceramics was studied. With the increase of Sr content, the piezoelectric coefficient of piezoelectric ceramics first increased and then decreased. When Sr content was 7%mol, the piezoelectric coefficient of piezoelectric ceramics reached the maximum value.The piezoelectric properties of piezoelectric ceramics were further improved when excessive Pb was added into PZT.In this paper, PZT piezoelectric ceramic targets were prepared by solid state sintering.The experimental results show that the radial sintering shrinkage of PZT ceramic sample is 14. The target mould is designed according to the shrinkage rate.In order to improve the compactness and uniformity of the target, the cold isostatic pressing method was used to press the billet.The sintering temperature and forming pressure of the target were determined by thermogravimetric analysis and sintering test.Finally, the piezoelectric ceramic target with relative density of 94.6% was obtained. The target formed a pure and single perovskite phase with uniform grain size and clear grain boundary.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB383.2

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