AlN陶瓷表面氧化及Mo-Mn法金属化研究
发布时间:2018-05-01 21:48
本文选题:AlN + 表面氧化 ; 参考:《人工晶体学报》2017年03期
【摘要】:对无压烧结制备的AlN陶瓷氧化处理,采用传统Mo-Mn法在预氧化后的AlN陶瓷表面制备金属化层,并在Mo-Mn金属化层表面实施镀镍制备Mo-Mn/Ni复合金属化层。研究了AlN陶瓷氧化及金属化对其导热性能、力学性能、表面相组成及显微结构的影响。结果表明:氮化铝陶瓷经过1100℃保温3 h的氧化处理之后,在其表面生成均匀分布的氧化铝层,热导率和抗弯强度分别提升了6.2%和26.6%。AlN陶瓷表层制备的Mo-Mn/Ni复合金属化层厚度约为28μm,Al_2O_3层、Mo-Mn层与Ni层之间通过元素的相互迁移形成扩散层,层间紧密结合。金属化后陶瓷的热扩散系数较纯AlN陶瓷基体提升3.8%。
[Abstract]:The AlN ceramics prepared by pressureless sintering were oxidized by traditional Mo-Mn method. The metallized layer was prepared on the surface of pre-oxidized AlN ceramics, and the Mo-Mn/Ni composite metallized layer was prepared by nickel plating on the Mo-Mn metallized surface. The effects of oxidation and metallization on the thermal conductivity, mechanical properties, surface phase composition and microstructure of AlN ceramics were studied. The results show that the aluminum nitride ceramic is oxidized at 1100 鈩,
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