二维层状材料原位电子辐照研究

发布时间：2018-08-14 08:48

【摘要】：纳米结构的高精度可控加工是制约器件小型化发展的重要限制因素之一,而基于透射电子显微镜的电子辐照有望在加工精度上推动纳米加工的进程.透射电子显微镜中高能电子束不仅能用于原子结构成像,还可用于原位辐照加工.因此,基于透射电子显微镜的电子辐照效应研究既有利于从原子尺度上探索材料在电子辐照作用下的结构稳定性及结构演变规律,又有利于加深对电子辐照过程的理解,为纳米结构的高精度可控加工提供理论依据和实验基础.本文将简要介绍几种常见的电子辐照效应,并综述近年来利用透射电子显微镜在石墨烯、氮化硼、过渡金属硫族化合物等二维层状材料原位辐照方面的研究进展,为进一步研究二维材料结构稳定性和精准、可控加工低维纳米结构提供参考.
[Abstract]:High precision and controllable fabrication of nanostructures is one of the important limiting factors to the development of miniaturization of devices, and electron irradiation based on transmission electron microscope (TEM) is expected to promote the process of nanofabrication. High energy electron beam in transmission electron microscope can be used not only for atomic structure imaging, but also for in situ irradiation processing. Therefore, the study of electron irradiation effect based on transmission electron microscope not only helps to explore the structure stability and structural evolution of materials under electron irradiation at atomic scale, but also helps to better understand the process of electron irradiation. It provides theoretical basis and experimental basis for high precision and controllable fabrication of nanostructures. In this paper, several common electron irradiation effects are briefly introduced, and the research progress of in situ irradiation of graphene, boron nitride, transition metal sulfur compounds and other two-dimensional layered materials using transmission electron microscopy in recent years is reviewed. It provides a reference for the further study of the stability and precision of two-dimensional materials and the controllable fabrication of low dimensional nanostructures.
【作者单位】：东南大学FEI纳皮米中心MEMS教育部重点实验室;东南大学-蒙纳什大学苏州联合研究院先进材料与制造中心;东南大学-江南石墨烯研究院先进碳材料应用联合研发中心;
【基金】：国家自然科学基金(51420105003,61274114,11327901,61601116,11674052) 国家杰出青年科学基金(11525415) 江苏省自然科学基金(BK2012024)资助
【分类号】：TB383

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