MIM测试结构表征介电薄膜高频特性的研究分析
发布时间：2018-08-18 15:08
【摘要】：采用金属-绝缘体-金属(MIM)测试结构表征薄膜高频特性时,差动法能有效地剥离测量过程中寄生效应对表征结果的消极影响。为此,借助仿真软件ADS深入探究了差动法中不同内径的结构组合,以及结构中底部电极的厚度和材料对表征结果的影响。结果表明:组合DM65-55(两个结构的内径分别为65μm和55μm)能较大限度剥离寄生效应的影响,其表征精度高达98.7%;底部电极厚度为0.1μm时,能得到较理想的表征结果;底部电极材料的改变对损耗角正切值的计算影响较大,其均值随着材料的电阻率减小而减小。
[Abstract]:When the high frequency characteristics of the films are characterized by metal-insulator-metal (MIM), the differential method can effectively peel off the negative effect of parasitic effect on the characterization results. For this reason, the structure combination of different inner diameters in the differential method, and the influence of the thickness of the bottom electrode and the material on the characterization results were investigated by the simulation software ADS. The results show that the combined DM65-55 (65 渭 m and 55 渭 m internal diameters of the two structures) can greatly affect the exfoliation parasitic effect, and the characterization accuracy is up to 98.7m, and the better characterization results can be obtained when the bottom electrode thickness is 0.1 渭 m. The change of the bottom electrode material has a great influence on the calculation of the tangent value of the loss angle, and its mean value decreases with the decrease of the resistivity of the material.
【作者单位】： 桂林电子科技大学机电工程学院;
【基金】：国家自然科学基金资助项目(No.61361004) 广西科学研究与技术开发计划资助项目(No.桂科转14124005-1-7)
【分类号】：TB383.2
本文编号：2189850
[Abstract]:When the high frequency characteristics of the films are characterized by metal-insulator-metal (MIM), the differential method can effectively peel off the negative effect of parasitic effect on the characterization results. For this reason, the structure combination of different inner diameters in the differential method, and the influence of the thickness of the bottom electrode and the material on the characterization results were investigated by the simulation software ADS. The results show that the combined DM65-55 (65 渭 m and 55 渭 m internal diameters of the two structures) can greatly affect the exfoliation parasitic effect, and the characterization accuracy is up to 98.7m, and the better characterization results can be obtained when the bottom electrode thickness is 0.1 渭 m. The change of the bottom electrode material has a great influence on the calculation of the tangent value of the loss angle, and its mean value decreases with the decrease of the resistivity of the material.
【作者单位】： 桂林电子科技大学机电工程学院;
【基金】：国家自然科学基金资助项目(No.61361004) 广西科学研究与技术开发计划资助项目(No.桂科转14124005-1-7)
【分类号】：TB383.2
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