固体激光器在晶硅太阳能电池制备中的应用研究

发布时间：2018-01-05 17:09

本文关键词：固体激光器在晶硅太阳能电池制备中的应用研究　出处：《渤海大学》2017年硕士论文　论文类型：学位论文

【摘要】：随着激光技术的不断发展,激光设备已解决各个领域通过普通工艺无法完成的技术难题,在各种激光器中,固体激光器具有结构牢固、稳定性强、良好的热性能和机械性能等优点,尤其适用于加工太阳电池。利用固体激光器制备局部背接触太阳电池能够满足工业生产对成本低廉且电池性能优良的需求。但不恰当的使用也会对电池造成损伤,若激光能量过大会使多余的热量传递至硅基底从而改变硅表面微结构。若输出能量过小,则会导致背沉积层不能被移除,电池串联电阻大,影响电池光电转换效率。所以降低激光器对硅片损伤,对于提高太阳电池效率具有重要意义。本课题主要通过以下三个方面,提高固体激光器加工晶硅太阳电池的电池性能。(一)优化固体激光器工作参数。通过理论与实验的方法,改变激光输出功率、扫描速度、重复频率等工作参数,对相同条件样片进行激光加工,通过比较有效少子寿命、发射级饱和电流、扩散区方块电阻等,得到最佳工作参数。(二)通过沉积减反层技术降低硅片表面载流子复合速率。在样品背表面沉积SiN_x、Al_2O_3薄膜和Al_2O_3/SiN_x叠层,利用硅片少子寿命表征实验结果:沉积SiN_x薄膜和Al_2O_3薄膜,少子寿命分别提高16.6%、18.5%。沉积Al_2O_3/SiN_x叠层少子寿命提高20.7%,优于前两者。(三)探究固体激光器加工局部背接触电池最佳工艺。实验分两部分进行:(a)先在硅片背表面沉积240nmSiN_x沉积层,然后利用固体激光器功率70%去除部分背表面沉积层,最终得到效率为17.05%的单晶硅电池。(b)先在硅片背表面沉积Al_2O_3/SiN_x叠层,再利用固体激光器70%去除部分背表面沉积层,最终得到效率为19.20%的单晶硅电池。综述,探索固体激光器在晶硅太阳能电池制备中的最佳参数及相应的工艺对于提高电池性能是十分有意义的。
[Abstract]:With the development of laser technology, laser equipment has to solve technical problems in various fields through the ordinary process can not be completed, in a variety of laser, solid laser has the advantages of firm structure, strong stability, thermal and mechanical properties of the advantages of good, especially suitable for processing solar cells. By local back contact solar cell can meet the industrial production the demand for low cost and excellent battery performance by using solid state laser system. But improper use can also cause damage to the battery, if the laser energy is too big to make excess heat transfer to the silicon substrate and silicon from the surface micro structure change. If the output energy is too small, it will lead to the back deposition layer cannot be removed, the battery series resistance, impact of photoelectric conversion efficiency. So the decrease of silicon laser damage, has very important significance for improving the efficiency of solar cell. This topic mainly through to Three aspects to improve the performance of the battery, solid state laser processing of silicon solar cells. (a) optimization of operating parameters of solid state laser. Through the method of theory and experiment, the change of laser output power, scanning speed, the working parameters of repetition frequency, laser processing of the same sample, by comparing the effective minority carrier lifetime, emission level the saturation current, diffusion sheet resistance, the optimal working parameters. (two) by depositing antireflection coating technology to reduce the surface recombination rate in the sample. The back surface deposition of SiN_x, Al_2O_3 and Al_2O_3 /SiN_x thin film laminated silicon wafers using lifetime characterization results: deposition of SiN_x film and Al_2O_3 film, the minority carrier lifetime increased 16.6%, the deposition of 18.5%. Al_2O_3/SiN_x stack lifetime increased by 20.7%, better than the former two. (three) of solid state laser processing of local optimum back shock experiment pool. The two part: (a) deposited on the surface of 240nmSiN_x layer on a silicon wafer back first, and then use the solid laser power of 70% to remove part of back surface layer, finally get the efficiency of silicon solar cells of 17.05%. (b) Al_2O_3/SiN_x layer deposited on the surface of the first wafer in the back, then use 70% solid laser to remove part of back surface sediments. Finally get the efficiency of silicon solar cell 19.20%. Review, to explore the best parameters of solid state lasers in crystalline silicon solar cell preparation and the corresponding process for improving the performance of the battery is very meaningful.

【学位授予单位】：渤海大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TM914.41;TN249

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