氧化钌及其电阻浆料的制备及性能研究

发布时间：2018-04-14 02:10

  本文选题：电阻浆料 + RuO_2　； 参考：《昆明理工大学》2017年硕士论文

【摘要】：制备电子元件的关键和核心是电子浆料,其质量的好坏直接关系到厚膜元件性能的优劣。电阻浆料作为电子浆料的重要组成部分,制备成应用于厚膜电路中的电阻,被广泛的应用在军事、宇航、通讯及汽车等领域。二氧化钌(RuO2)电阻浆料是电阻浆料的重要组成部分。Ru02具有良好的催化活性,稳定的化学性能等优点,同时是类金属性的高电导率金属氧化物,在电化学催化、氯碱工业和集成电路等领域中得到广泛应用。使用RuO2制备的电阻器,具有阻值范围宽、噪声小、抗还原能力强、耐受高功率的负荷、长期贮存稳定性好等优点,所以Ru02厚膜电阻浆料在片式电阻器和厚膜集成电路中占很大的比重。我国钌系浆料核心技术和生产能力达不到发达国家的水平,在一些领域所需要的电阻浆料依赖于进口,我国对RuO2电阻浆料进行了很多研究但仍然存在不同批次之间阻值不稳定的问题。本文从Ru02的制备着手,使用化学沉淀法进行制备Ru02,分别在30℃,65℃,95℃下使用RuC13与NH4HC03,NaOH和四甲基碳酸氢铵(TMAHC)反应,之后将制得的粉体进行洗涤,过滤,烘干;使用水淬球磨的方法制备玻璃粉;使用水浴加热的方法制得有机载体。将制备的RuO2、玻璃粉、有机载体按照一定的配比调制成为电阻浆料,之后印刷、烘干、烧结成电阻膜片,最终得出以下结论:在制备Ru02时,粉体粒度随着反应温度的增加而增大;在相同的反应温度下,使用TMAHC溶液制备的RuO2粉体,相比于其他两种溶液,分布更为均匀,团聚现象不明显,同时根据测得的电阻片的阻值,在调制浆料时,更加适用于配制中低阻值的浆料;RuO2的晶化温度在270-400℃之间,在850℃烧结之后,结晶水已完全消失转化为金红石型结构。本文制备的硼硅酸盐玻璃相,根据测得的电阻值、表面观察和能谱分析,其高温流动性和粘结性能更加适用于中高阻值浆料。
[Abstract]:The key and core of the preparation of electronic components is the electronic slurry, the quality of which is directly related to the performance of thick film components.As an important part of electronic slurry, resistor paste is widely used in military, aerospace, communication and automobile fields.Ru02 is an important component of resistive paste. Ru02 has good catalytic activity and stable chemical properties. Ru02 is also a kind of metalloid metal oxide with high conductivity in electrochemical catalysis.Chlor-alkali industry and integrated circuits and other fields have been widely used.The resistor prepared with RuO2 has the advantages of wide range of resistance, low noise, strong anti-reduction ability, high power load tolerance, good long-term storage stability, etc.Therefore, Ru02 thick film resistor paste accounts for a large proportion in chip resistors and thick film integrated circuits.The core technology and production capacity of ruthenium slurry in China is not up to the level of developed countries, and the resistive paste needed in some fields depends on imports.A lot of researches have been done on RuO2 resistor paste in China, but there is still the problem of instability of resistance value between different batches.In this paper, Ru02 was prepared by means of chemical precipitation method. Ru02 was prepared by chemical precipitation method. The Ru02 was prepared by the reaction of RuC13 with NH4HC03NaOH and tetramethyl ammonium bicarbonate at 30 鈩，

本文编号：1747237