非共振式压电直线电机精密驱动及定位控制

发布时间：2018-08-10 21:17

【摘要】：为实现光机结构、集成电路等领域中大行程及高精度的位移控制,利用较为适用的非共振式尺蠖型压电直线电机,基于高压功率运算放大器,设计了非共振式压电直线电机的精密复合放大驱动电路,通过理论分析及实验得到的伯德图验证了驱动电路的分辨率和幅频特性。以现场可编程门阵列(FPGA)为核心处理器,以光栅尺为反馈元件,通过分析非共振式压电直线电机的多种运行模式,根据直线电机的运行时序,设计完成了开环大范围整步运行模式与闭环小范围单步运行模式相结合的控制策略,在单步运行模式中分别设计完成了PID控制算法及PID与压电陶瓷迟滞逆模型前馈相结合的复合控制算法。实验结果表明,该控制策略能够实现大行程内的精密位移控制,复合控制算法具有比PID更加优越的控制效果,能够在21mm大行程内实现1.5nm的闭环定位控制精度,直线电机的最大驱动力可达300N,满足大行程高精度位移控制的应用需求。
[Abstract]:In order to realize the large stroke and high precision displacement control in the field of optical machine structure, integrated circuit and so on, the non-resonant geometrid piezoelectric linear motor is used based on high voltage power operational amplifier. The precise compound amplifier driving circuit of non-resonant piezoelectric linear motor is designed. The resolution and amplitude frequency characteristics of the drive circuit are verified by theoretical analysis and experimental results. The field programmable gate array (FPGA) is used as the core processor and the grating ruler as the feedback element. By analyzing the various operation modes of the non-resonant piezoelectric linear motor, the running sequence of the linear motor is analyzed. A control strategy combining open-loop, large-range, single-step operation mode with closed-loop, small-range, single-step operation mode is designed. In the single-step operation mode, the PID control algorithm and the compound control algorithm combining PID with the hysteresis inverse model feedforward of piezoelectric ceramics are designed and completed respectively. The experimental results show that the control strategy can realize the precision displacement control in the long stroke, and the compound control algorithm has more superior control effect than PID, and can realize the closed loop positioning control precision of 1.5nm in the long stroke of 21mm. The maximum driving force of linear motor is up to 300 Ns, which can meet the needs of large stroke and high precision displacement control.
【作者单位】：中国科学院长春光学精密机械与物理研究所;
【基金】：国家自然基金重大科研仪器研制项目(No.41527806)
【分类号】：TM359.4

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