衬底温度对碲化镉薄膜结构及光学性能的影响
发布时间：2019-08-12 16:16
【摘要】：碲化镉(CdTe)因具有良好的光电性能和吸收性能经常被作为太阳电池的吸收层材料。以纯度为99.99%的CdTe陶瓷靶为靶材在玻璃衬底上采用射频磁控溅射的方法制备了一系列的CdTe薄膜,研究了衬底温度对样品薄膜的厚度、结构和光学性能的影响。结果表明:随着衬底温度的增加薄膜的厚度在逐渐地减少;制备的薄膜都是立方闪锌矿结构且具有高度的(111)面择优取向;薄膜对可见光有较好的吸收性能,随衬底温度的增加而减小。
[Abstract]:Cadmium telluride(CdTe)is often used as an absorbent layer material for solar cells because of its excellent photoelectric and absorption properties. A series of CdTe thin films were prepared by RF magnetron sputtering with 99.99%purity CdTe ceramic target. The results show that the thickness of the film decreases gradually with the increase of substrate temperature. The prepared thin films are all cubic sphalerite structures and have a high(111)plane preferred orientation;The film has good absorption performance of visible light and decreases with the increase of substrate temperature.
【作者单位】： 暨南大学信息科学技术学院;暨南大学韶关研究院;
【基金】：广东大学生科技创新培育专项资金项目(pdjh2017b0056) 广东省省级科技计划项目(2014A010106014) 暨南大学韶关研究院新型研发机构初创期建设补助项目(2016B090919014)
【分类号】：TM914.4
，
本文编号：2525820
[Abstract]:Cadmium telluride(CdTe)is often used as an absorbent layer material for solar cells because of its excellent photoelectric and absorption properties. A series of CdTe thin films were prepared by RF magnetron sputtering with 99.99%purity CdTe ceramic target. The results show that the thickness of the film decreases gradually with the increase of substrate temperature. The prepared thin films are all cubic sphalerite structures and have a high(111)plane preferred orientation;The film has good absorption performance of visible light and decreases with the increase of substrate temperature.
【作者单位】： 暨南大学信息科学技术学院;暨南大学韶关研究院;
【基金】：广东大学生科技创新培育专项资金项目(pdjh2017b0056) 广东省省级科技计划项目(2014A010106014) 暨南大学韶关研究院新型研发机构初创期建设补助项目(2016B090919014)
【分类号】：TM914.4
，
本文编号：2525820
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