MEMS低频压电振动能量采集器

发布时间：2018-03-08 19:10

本文选题：低频振动　切入点：压电能量采集器　出处：《光学精密工程》2014年09期 　论文类型：期刊论文

【摘要】：设计了基于微机电系统(MEMS)的一阶、二阶传动低频压电振动能量采集器,通过压电效应将低频振动能量转化为电能来解决低频(小于200Hz)振动环境中的能量采集问题。一阶传动能量采集器模型包括一阶传动梁及压电悬臂梁,二阶传动能量采集器模型包括一阶传动梁、二阶传动梁及压电悬臂梁。数学建模及有限元分析显示:采集器工作频率随一阶、二阶传动梁及压电悬臂梁材料的杨氏模量的减小均呈单调递减的趋势;传动梁的设计可有效降低采集器的高阶工作频率、拓宽工作带宽;而二阶传动梁可以在1g加速度条件下,获得10.98Hz和44.52Hz两个超低频率的电压峰值(分别为3.18V/g和1.33V/g),使系统工作频率降得更低,50Hz以下的有效工作带宽更宽,更适合与低频振动环境匹配进行能量采集。
[Abstract]:The first and second order drive low frequency piezoelectric vibration energy collector based on MEMS is designed. The problem of energy acquisition in low frequency (less than 200Hz) vibration environment is solved by converting low frequency vibration energy into electric energy by piezoelectric effect. The first order transmission energy collector model includes first order transmission beam and piezoelectric cantilever beam. The second order transmission energy collector model includes the first order transmission beam, the second order transmission beam and the piezoelectric cantilever beam. The mathematical model and finite element analysis show that the frequency of the collector works with the first order. The Young's modulus of the second order transmission beam and the piezoelectric cantilever beam decrease monotonously, the design of the transmission beam can effectively reduce the high order working frequency of the collector and widen the working bandwidth, while the second order transmission beam can work under the condition of 1 g acceleration. Two ultra-low frequency voltage peaks of 10.98 Hz and 44.52 Hz (3.18 V / g and 1.33 V / g / g) are obtained respectively, which makes the effective operating bandwidth lower than 50 Hz and more suitable for energy acquisition matching with low-frequency vibration environment.
【作者单位】：太原理工大学信息工程学院微纳系统研究中心;太原理工大学新型传感器与智能控制教育部和山西省重点实验室;
【基金】：国家自然科学基金资助项目(No.51205276,51205275) 中国博士后科学基金资助项目(No.20110491629,2013T60268) 山西省研究生优秀创新项目(No.20133032) 山西省青年科学基金资助项目(No.2012021021-5,2013021017-1) 山西省归国留学人员基金资助项目(No.2013-036) 太原理工大学大学生创新项目
【分类号】：TM619

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