单晶硅薄膜的制备及在太阳能电池、SERS中的应用

发布时间：2018-04-22 05:32

本文选题：纳米 + 拉曼光谱　；参考：《大连理工大学》2014年博士论文

【摘要】：提高单晶硅薄膜太阳能电池的光电转换效率、降低成本、提高制备面积,使太阳能电池更有效地应用于生产实践中,是科研工作者致力研究的方向。本文采用湿法腐蚀、薄膜沉积、退火和薄膜转移技术制备了纳米多孔硅薄膜和柔性单晶硅薄膜太阳能电池,提高了太阳能电池光电转换效率和制备面积。同时采用三维时域有限差分方法对纳米薄膜进行数值模拟,研究其物理机制,对实验结果给予理论解释。 1.通过湿法腐蚀、溅射、退火等工艺,在单晶硅表面制备了金字塔型纳米多孔硅抗反射薄膜。实验上测得其反射率在300-1050nm波长范围内小于2%,在现有的纳米多孔硅抗反射薄膜文献中达到最好结果。将其应用于薄膜或块体单晶硅材料的太阳能电池,可提高太阳能电池的光电转换效率。同时,本文使用周期性的单晶硅金字塔衬底作为模板,利用纳米压印方法制备聚合物太阳能电池抗反射薄膜。由于聚合物材料具有耐强酸碱性,柔软和对可见光的高透射性,使得这种薄膜既可作为柔性薄膜太阳能电池的抗反射薄膜又可作为太阳能电池的保护膜,可被广泛应用于各种柔性薄膜太阳能电池。 2.本文创新性地提出电极辅助转移(Frame-Assisted Membrane Transfer, FAMT)技术,相对于传统转移技术,此方法的最大优点是工艺简单、可大面积的转移纳米薄膜。本文利用FAMT技术制备了大面积单晶硅和磷化铟材料的柔性薄膜太阳能电池。通过研究扩散、退火、弯曲以及转移对太阳能电池性能的影响,实验结果得到1.7gm厚的柔性单晶硅薄膜太阳能电池的光电转换效率为1.12%；1μm柔性磷化铟薄膜太阳能电池的光电转换效率为1%,其功率重量比已接近国际领先水平。此方法制备的薄膜太阳能电池不受基底材料的限制,提高柔性薄膜太阳能电池的适应性,可将其广泛应用于人们的生产生活中。 3.通过总结单晶硅金字塔腐蚀技术和金属纳米薄膜沉积技术,同时在调研现有周期性金字塔SERS衬底文献的基础上,本文首次在非周期性金字塔表面沉积金纳米薄膜制备SERS寸底。实验结果表明该衬底有效地提高了R6G探针分子拉曼光谱检测的灵敏度、强度和均匀性,其增强因子达到3.8×105。通过三维时域有限差分方法对此衬底进行数值模拟,来研究其物理增强机制。首次证明该SERS衬底的物理增强主要来自表面等离子体增强,同时发现这种增强位于金字塔与金字塔之间的交界线,我们称其为“热线”,其有效地提高了衬底增强的强度和均匀性。
[Abstract]:To improve the photoelectric conversion efficiency, reduce the cost, increase the preparation area, and make the solar cells more effective in the production practice is the research direction of the scientific research workers to improve the photoelectric conversion efficiency of monocrystalline silicon thin film solar cells. Nano-porous silicon thin films and flexible monocrystalline silicon thin film solar cells were prepared by wet etching, thin film deposition, annealing and thin film transfer technology. The photovoltaic conversion efficiency and preparation area of solar cell were improved. At the same time, the three-dimensional finite-difference time-domain method is used to simulate the nanocrystalline films, the physical mechanism is studied, and the experimental results are explained theoretically. 1. Pyramidal porous silicon antireflective films were prepared on the surface of monocrystalline silicon by wet etching, sputtering and annealing. The reflectivity measured experimentally is less than 2 in the 300-1050nm wavelength range, and the best results have been obtained in the existing literature of nano-porous silicon antireflective films. The photovoltaic conversion efficiency of solar cells can be improved by applying them to solar cells with thin films or bulk monocrystalline silicon. At the same time, the periodic monocrystalline silicon pyramid substrate was used as a template to prepare polymer solar cell antireflective film by nano-imprint method. Due to their strong acid resistance, softness and high transmittance to visible light, the polymer materials can be used as both anti-reflective and protective films for flexible thin film solar cells. It can be widely used in various flexible thin film solar cells. 2. In this paper, the electrode assisted transfer Membrane transfer (FAMTT) technique is proposed. Compared with the traditional transfer technology, the biggest advantage of this method is that the technology is simple and can transfer nanocrystalline films in large area. In this paper, flexible thin film solar cells with large area monocrystalline silicon and indium phosphide materials were fabricated by FAMT technology. By studying the effects of diffusion, annealing, bending and transfer on the performance of solar cells, The experimental results show that the photovoltaic conversion efficiency of flexible monocrystalline silicon thin film solar cells with 1.7gm thickness is 1.12 渭 m and that of 1 渭 m flexible indium phosphide thin film solar cells is 1. The power weight ratio is close to the international leading level. The thin film solar cells prepared by this method are not limited by substrate materials and can be widely used in the production and life of people because of improving the adaptability of flexible thin film solar cells. 3. On the basis of summarizing the technology of monocrystalline silicon pyramidal etching and metal nanocrystalline film deposition, and on the basis of the existing literature of periodic pyramid SERS substrate, this paper first deposited gold nanocrystalline film on aperiodic pyramid surface to prepare SERS inch bottom. The experimental results show that the substrate can improve the sensitivity, intensity and uniformity of Raman spectra of R6G probe effectively, and the enhancement factor is 3.8 脳 10 ~ 5. The physical enhancement mechanism of the substrate is studied by numerical simulation of the substrate by three dimensional finite-difference time-domain method. It is the first time to prove that the physical enhancement of the SERS substrate comes mainly from surface plasma enhancement, and that the enhancement is located at the junction of the pyramid and the pyramid, which we call the "hot line." It effectively improves the intensity and uniformity of substrate enhancement.
【学位授予单位】：大连理工大学
【学位级别】：博士
【学位授予年份】：2014
【分类号】：TM914.4

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