锆酸铅基反铁电薄膜的制备与储能性能研究

发布时间：2018-05-04 02:51

本文选题：PZ反铁电薄膜 + 能量存储密度　；参考：《湘潭大学》2014年硕士论文

【摘要】：脉冲高功率技术是当今高新技术的重要发展方向，储能电容器作为脉冲高功率电源的关键元件，在整个设备中占有很大的比重，是极为重要的关键部件。反铁电材料因具有很高的理论储能密度，特别适合用于制作脉冲高功率储能电容器，近年来引起了研究者的关注。PbZrO3(PZ)是一种典型的钙钛矿反铁电材料，是最有前景的脉冲高功率电源用新型反铁电储能介质材料。但是，目前实验制备的PZ反铁电薄膜的能量存储密度较低，不能满足实际应用。因此，进一步提高PZ反铁电薄膜的能量存储密度是实现其在脉冲高功率电源的应用的首要任务。本论文围绕改进PZ反铁电薄膜的储能性能来展开研究工作。主要研究工作与结果如下： 1.单一PZ反铁电薄膜的制备及储能性能分析采用溶胶-凝胶法在Pt(111)/Ti/SiO2/Si衬底上制备了PZ反铁电薄膜，探索了薄膜生长的最佳退火温度和退火时间，并表征了其微观结构和电学性能。实验结果表明，在700oC下退火20min时，PZ薄膜性能最好，在最大500kV/cm外加电场下，，其最大极化强度(Pmax)和最大储能密度分别为70.3μC/cm2和13.52J/cm3。 2.不同结构的PZ/BT-BMT复合薄膜的制备及储能性能分析将PZ反铁电薄膜和具有高介电常数、高耐电场击穿强度的0.88BaTiO3-0.12Bi(Mg0.5,Ti0.5)O3(BT-BMT)铁电薄膜结合在一起形成不同结构的复合薄膜，分别研究了叠层结构、夹心结构、交错结构复合薄膜的微结构及电学性能。对于叠层结构复合薄膜，最大电场下的Pmax为90.9μC/cm2，最大储能密度为15.3J/cm3；对于夹心结构复合薄膜，最大电场下的Pmax为92.2μC/cm2，最大储能密度为19.9J/cm3；对于交错结构复合薄膜，最大电场下的Pmax为95.7μC/cm2，最大储能密度为24.7J/cm3。以上结果表明，采用与BT-BMT铁电薄膜复合的方法能有效提高PZ反铁电薄膜的储能密度。 3. PZ/BT-BMT复合薄膜退火工艺的改进及储能性能分析改进复合薄膜的退火工艺，采用逐层退火的方法制备复合薄膜，即每甩完一层薄膜都进行干燥、热分解和退火处理。和一次退火的复合薄膜相比，逐层退火的复合薄膜储能性能得到显著改善。逐层退火的夹心复合薄膜最大储能密度为28.4J/cm3，逐层退火的交错复合薄膜最大储能密度为33J/cm3。这归因于逐层退火的复合薄膜极化取向度更高，从而具有更大的极化强度和更高的储能密度。
[Abstract]:Pulse high power technology is an important development direction of modern high technology. As a key component of pulse high power supply, energy storage capacitor occupies a large proportion in the whole equipment and is an extremely important key component. Because of its high theoretical energy storage density, antiferroelectric materials are especially suitable for making pulsed high-power energy storage capacitors. In recent years, anti-ferroelectric materials have attracted the attention of researchers. PbZrO3PZ) is a typical perovskite antiferroelectric material. It is the most promising new anti-ferroelectric energy storage dielectric material for pulsed high power power supply. However, the PZ antiferroelectric thin films have low energy storage density and can not meet the practical application. Therefore, further improving the energy storage density of PZ antiferroelectric thin film is the most important task to realize the application of PZ antiferroelectric thin film in pulsed high power power supply. This thesis focuses on improving the energy storage performance of PZ antiferroelectric thin films. The main work and results are as follows: 1. Preparation of a single PZ antiferroelectric thin film and analysis of its energy storage performance PZ antiferroelectric thin films were prepared on Pt(111)/Ti/SiO2/Si substrates by sol-gel method. The optimum annealing temperature and annealing time were investigated. The microstructure and electrical properties of PZ antiferroelectric thin films were characterized. The experimental results show that the PZ films annealed at 700oC have the best properties, and the maximum polarization intensity and energy storage density are 70.3 渭 C/cm2 and 13.52 J / cm _ 3 under the maximum external electric field of 500kV/cm, respectively. 2. Preparation and Energy Storage Properties of PZ/BT-BMT Composite Films with different structures PZ antiferroelectric thin films and 0.88BaTiO3-0.12BiTiO3-0.12BiO0.12BT-BMT-based ferroelectric thin films with high dielectric constant and high electric field breakdown strength were combined to form composite thin films with different structures. The laminated and sandwich structures were studied, respectively. Microstructure and electrical properties of interleaved composite films. For laminated composite films, the Pmax is 90.9 渭 C / cm ~ (2) and the maximum energy storage density is 15.3J / cm ~ (-3) under the maximum electric field, the Pmax is 92.2 渭 C / cm ~ (2) and the maximum energy storage density is 19.9J / cm ~ (3) for sandwich structure composite films. Under the maximum electric field, the Pmax is 95.7 渭 C / cm ~ (2) and the maximum energy storage density is 24.7 J / cm ~ (3). The results show that the energy storage density of PZ antiferroelectric thin films can be effectively increased by using the composite method with BT-BMT ferroelectric thin films. 3. Improvement of annealing process for PZ/BT-BMT Composite Films and Analysis of their Energy Storage Properties The annealing process of the composite films was improved. The composite films were prepared by layer by layer annealing, that is, the films were dried, thermal decomposed and annealed each time. Compared with the single annealed composite films, the energy storage properties of the films annealed layer by layer have been significantly improved. The maximum energy storage density of sandwich composite films annealed layer by layer is 28.4J / cm ~ 3, and that of interleaved composite films annealed layer by layer is 33J / cm _ 3. This is attributed to the higher polarization orientation of the films annealed layer by layer, resulting in higher polarization intensity and higher energy storage density.
【学位授予单位】：湘潭大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TM221;TB383.2

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