基于SILVACO的太阳电池二次扩散工艺仿真研究

发布时间：2018-05-12 10:40

  本文选题：太阳电池 + 扩散　； 参考：《计算机仿真》2014年12期

【摘要】：针对太阳能电池扩散区无法准确测量的困难,应用仿真软件可以更好的研究太阳能电池扩散区。应用SILVACO软件对太阳电池的两步扩散工艺进行了仿真研究,探索了不同的二次扩散工艺方法对太阳电池性能和扩散区结构的影响。分别对湿法氧化扩散工艺、二氧化硅保护扩散工艺和无氧扩散工艺进行仿真设计。仿真结果表明,湿法氧化二次扩散工艺可以提高电池的表面杂质浓度,形成较浅的PN结。通过对三种不同工艺电池光谱响应的仿真,发现应用湿法氧化二次扩散工艺可以获得最佳光谱响应性能。通过对湿法氧化二次扩散工艺的扩散温度、预淀积浓度的研究,发现随着二次扩散温度的增加,电池的短路电流先增加后降低;随着预淀积浓度的增加,电池的短路电流先增加后降低。
[Abstract]:In view of the difficulty that the diffusion zone of solar cells can not be measured accurately, the application of simulation software can better study the diffusion zone of solar cells. The two-step diffusion process of solar cells was simulated by using SILVACO software. The effects of different secondary diffusion processes on the performance and diffusion zone structure of solar cells were explored. The wet oxidation diffusion process, silica protective diffusion process and non-oxygen diffusion process were simulated and designed respectively. The simulation results show that the secondary diffusion process of wet oxidation can increase the concentration of impurity on the surface of the battery and form a shallow PN junction. Through the simulation of the spectral response of three different processes, it is found that the optimum spectral response can be obtained by using the wet oxidation secondary diffusion process. Through the study of the diffusion temperature and the pre-deposition concentration of the wet oxidation secondary diffusion process, it is found that with the increase of the secondary diffusion temperature, the short-circuit current of the battery increases first and then decreases, and with the increase of the pre-deposition concentration, The short circuit current of the battery first increases and then decreases.
【作者单位】： 常熟理工学院物电学院;
【基金】：国家自然科学青年基金项目(51205212)
【分类号】：TM914.4
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本文编号：1878307