非接触静电放电测试低重复特性分析研究

发布时间：2018-06-16 23:09

本文选题：放电参数 + 放电间隙　；参考：《电波科学学报》2014年05期

【摘要】：基于自主研发的新型测试系统,对小间隙静电放电(Electrostatic Discharge,ESD)中电极移动速度和气体压强引起放电参数的低重复离散特性进行探讨.新型测试系统采用机电一体化设计,解决了带电体与受电体高速相向运动与避免强烈撞击损坏仪器的难题,并实现对多种影响因素的有效测量.用新型测试系统测量了气体压强变化和向放电靶移动电极速度等放电参数.静电放电模拟器移动距离控制在(10~40cm)的范围.电极移动速度变化(v)为14cm/s,则放电电流峰值改变(I)达到0.5A,空气压强变化对放电电流最高峰值的影响十分明显,压强变化(p)为0.06个大气压时,则峰值电流变化(I)为0.5A,证明了电极移动速度和空气压强对放电参数产生的影响;对放电参数受电极移动速度和气体压强变化而出现显著差异的可能机制给出了初步分析.
[Abstract]:Based on a new test system developed by ourselves, the characteristics of low repetition dispersion of discharge parameters caused by electrode moving speed and gas pressure in Electrostatic discharge (ESD) with small gap are discussed. The new test system adopts the design of mechatronics, which solves the problem of high speed direction motion of charged and electrically charged body and avoids strong impact damage instrument, and realizes the effective measurement of many influencing factors. The discharge parameters such as gas pressure variation and electrode velocity moving towards the discharge target were measured by a new measuring system. The moving distance of electrostatic discharge simulator is controlled in the range of 10 ~ 40 cm. The change of electrode moving velocity (v) is 14 cm / s, and the peak value of discharge current (I) is 0.5 A. the effect of air pressure on the peak value of discharge current is very obvious, and the change of pressure (p) is 0.06 atmospheres. The peak current variation (I) is 0.5A, which proves the influence of electrode moving speed and air pressure on discharge parameters, and gives a preliminary analysis of the possible mechanism of significant differences between discharge parameters and the changes of electrode moving speed and gas pressure.
【作者单位】：贵州师范大学电子信息系;贵州省机械电子产品质量监督检验院;同济大学电信工程学院;英国约克大学纳米电子学和纳米技术研究所;贵州航天计量测试研究所;
【基金】：国家自然科学基金(No.60971078) 贵州省国际科技合作计划项目(No.G[2012]7019) 贵阳市白云区科技计划项目(白科合同[2014]10号)
【分类号】：O441.1

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