非晶硅薄膜太阳能电池结构设计与关键工艺研究

发布时间：2019-06-03 22:46

【摘要】：非晶硅薄膜太阳能电池具有制备成本低,可低温沉积,适用于柔性衬底等优势,是今后第三代电池发展的强力候选之一。然而,传统结构的电池,如单结非晶硅电池、双结非晶硅电池其固有的特点限制着非晶硅电池的转换效率,影响着非晶硅电池的发展,本文提出了一种带有多层吸收层的非晶硅太阳能电池。从理论上分析了非晶硅电池各个层参数对电池转换效率的影响,对双结电池和多层吸收层非晶硅电池做出对比,分析了其效率提高的原因。同时利用PECVD法制备了电池的双层吸收层。此外,还制备了非晶硅表面陷光结构,分析了纳秒激光对吸光结构的影响。本文的主要研究内容如下:优化了单结非晶硅太阳能电池,得到了转换效率为11%的单结非晶硅太阳能电池。在单结电池的基础上,模拟出双结电池的转换效率为11.281%,建立了吸收层为四层的非晶硅电池的模型,得到转换效率为13.727%的太阳能电池,其在近红外波段有着明显的光谱响应,理论上分析了多层吸收层电池优于传统电池的效率的原因。针对电池表面对太阳光反射的损失,本文制备了具有陷光结构的非晶硅薄膜,分析了在不同气氛条件、不同激光能量及不同扫描速度下,对薄膜表面结构及光学性质的影响。得到了在六氟化硫气氛中,能量为3mJ/cm2及扫描速度为0.4?m/s下薄膜的反射率最低。制备了非晶硅太阳能电池的双吸收层结构,先利用PECVD法在不同腔内压强下制备非晶硅薄膜,分析了不同压强下薄膜的光吸收特性及傅里叶红外谱。得到了在压强为80pa下薄膜的光学特性最优。在此基础上进行不同气氛条件的激光退火。得到了在六氟化硫下双层结构薄膜在700nm-1100nm近红外区有明显的吸收。
[Abstract]:Amorphous silicon thin film solar cells have the advantages of low preparation cost, low temperature deposition and suitable for flexible Substrates. Amorphous silicon thin film solar cells are one of the powerful candidates for the development of the third generation batteries in the future. However, traditional batteries, such as single-junction amorphous silicon cells, double-junction amorphous silicon cells have inherent characteristics that limit the conversion efficiency of amorphous silicon cells and affect the development of amorphous silicon cells. In this paper, an amorphous silicon solar cell with multi-layer absorption layer is proposed. The influence of various layer parameters of amorphous silicon cell on the conversion efficiency of amorphous silicon cell is analyzed theoretically. The double junction battery and multi-layer absorption layer amorphous silicon cell are compared, and the reasons for the improvement of the efficiency are analyzed. At the same time, the double layer absorption layer of the battery was prepared by PECVD method. In addition, the surface notch structure of amorphous silicon was also prepared, and the effect of nanosecond laser on the absorption structure was analyzed. The main research contents of this paper are as follows: the single-junction amorphous silicon solar cells are optimized, and the single-junction amorphous silicon solar cells with conversion efficiency of 11% are obtained. On the basis of single junction cell, the conversion efficiency of double junction cell is 11.281%. The model of amorphous silicon cell with four layers of absorption layer is established, and the solar cell with conversion efficiency of 13.727% is obtained. It has obvious spectral response in the near infrared band. The reason why the multi-layer absorption layer battery is superior to the traditional battery is analyzed theoretically. In view of the loss of solar light reflection on the surface of the battery, amorphous silicon thin films with trapping structure were prepared in this paper. the effects of different atmosphere conditions, different laser energy and scanning speed on the surface structure and optical properties of the films were analyzed. The reflectivity of the thin films with energy of 3mJ/cm2 and scanning speed of 0.4?m/s is the lowest in sulfur hexafluoride atmosphere. The double absorption layer structure of amorphous silicon solar cells was prepared. Amorphous silicon thin films were prepared by PECVD method at different intracavity pressures. The optical absorption properties and Fourier infrared spectra of the films at different pressures were analyzed. The optical properties of the films are obtained when the pressure is 80pa. On this basis, laser annealing under different atmosphere conditions was carried out. It is obtained that the bilayer structure thin films have obvious absorption in the near infrared region of 700nm-1100nm under sulfur hexafluoride.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TM914.4

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