激光预处理提升DKDP晶体加工表面的抗损伤能力

发布时间：2018-01-12 10:19

本文关键词：激光预处理提升DKDP晶体加工表面的抗损伤能力　出处：《光学精密工程》2017年08期 　论文类型：期刊论文

【摘要】：针对晶体表面的损伤特性,采用小光斑扫描激光预处理技术预辐照DKDP晶体元件,并采用表面损伤自动探测系统实时分析每个脉冲辐照后晶体表面的损伤情况,比较预处理和未预处理区域的损伤点密度确定表面预处理效果,并进一步模拟分析表面各类缺陷在纳秒强激光辐照下的动态过程,解释激光预处理对精抛表面提升作用的微观机制并分析它对粗抛表面提升不明显的原因。实验结果表明,激光预处理技术对粗抛表面的提升作用并不明显,但是可以大幅度抑制精抛表面的损伤点密度。在本文的实验条件下,晶体表面的抗激光损伤能力可以提升约60%。比较体材料和精抛表面的预处理效果发现:当体材料的抗破坏能力通过预处理提升后,精抛表面的抗激光损伤能力也会提升,由此可见精抛表面的激光预处理效果与体材料性能相关。
[Abstract]:According to the damage characteristics of the crystal surface, DKDP crystal elements were preirradiated by the small spot scanning laser pretreatment technique. An automatic surface damage detection system is used to analyze the damage of the crystal surface after each pulse irradiation in real time, and the effect of surface pretreatment is determined by comparing the damage point density of the pretreated and unpretreated regions. The dynamic process of various defects on the surface under nanosecond laser irradiation is further simulated and analyzed. The microcosmic mechanism of laser pretreatment on the surface lifting of fine throwing is explained and the reason why it is not obvious to the surface of rough throwing is analyzed. The experimental results show that the lifting effect of laser pretreatment on the surface of rough throwing is not obvious. However, the damage point density on the surface of fine throwing can be greatly inhibited. Under the experimental conditions in this paper. The laser damage resistance of the crystal surface can be improved by about 60%. Compared with the pretreatment effect of the bulk material and the fine cast surface, it is found that: when the damage resistance of the bulk material is improved by pretreatment. The laser damage resistance of the surface is also improved, which shows that the laser pretreatment effect is related to the properties of bulk materials.
【作者单位】：中国科学院上海光学精密机械研究所中国科学院强激光材料重点实验室;中国科学院大学;
【基金】：国家自然科学基金资助项目(No.61405219,No.11304328)
【分类号】：O786;TN249
【正文快照】： 2.中国科学院大学,北京100049)(1.Key Laboratory of Materials for High Power Laser,Shanghai Institute of Optics and FineMechanics,Chinese Academy of Sciences,Shanghai 201800,China;2.University of Chinese Academy of Sciences,Beijing100049,China)*Correspondin

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