基于空间光调制器的能量可控飞秒激光加工

发布时间：2018-01-20 05:25

本文关键词： 激光制造飞秒激光双光子聚合加工空间光调制器计算全息　出处：《中国激光》2017年01期 　论文类型：期刊论文

【摘要】：针对飞秒激光微纳加工技术中激光与加工样品相对运动的控制、聚焦光斑能量的控制中存在的问题,提出一种基于硅基液晶空间光调制器动态加载计算全息图同时控制焦点位置和能量的新型加工方法。该方法通过加载叠加闪耀光栅的全息图,控制单点运动来扫描加工二维结构,无需平台移动。进一步控制全息图的挖空区域,可以调制入射光斑的能量,进而控制被加工点阵的形貌。利用这一加工效应,成功实现各种可控环状结构的加工,并在光学显微镜下测试达到相应效果,证明这种加工方法在飞秒激光微纳加工领域具有可行性。
[Abstract]:Aiming at the control of relative motion between laser and sample in femtosecond laser micro-nano machining technology and the control of focusing spot energy, there are some problems. A new processing method based on silicon based liquid crystal spatial light modulator is proposed, which can control the focus position and energy simultaneously by dynamically loading the CGH, and the hologram with superimposed blazed grating is loaded in this method. The single point motion is controlled to scan and process the two-dimensional structure without the platform moving, and the holographic hologram can be further controlled to modulate the energy of the incident spot. Then the morphologies of the processed lattice are controlled. By using this processing effect, the fabrication of various controllable ring structures is successfully realized, and the corresponding effect is obtained by optical microscope test. It is proved that this method is feasible in the field of femtosecond laser micromachining.
【作者单位】：中国科学技术大学精密机械与精密仪器系;
【基金】：国家自然科学基金(51275502,61475149,51405464,91223203,91423103,11204250) 中国青年千人计划安徽省自然科学基金(1408085ME104) 中央高校基本科研业务费专项资金(WK6030000004)
【分类号】：TN761;TN249
【正文快照】： 飞秒激光加工技术已成为微纳加工领域的前沿技术之一[1]。与传统连续长脉冲激光相比,飞秒激光在微纳加工方面具有许多不可比拟的独特优势,如真三维、分辨率高、热影响小和加工材料广泛等优点[2-3]。飞秒激光的这些优势,使其在微光学、微机械、微流体和生物医学等领域都有广泛

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