基于耦合VCSEL阵列的光束操控研究

发布时间：2018-03-03 10:54

本文选题：耦合VCSEL阵列　切入点：光束操控　出处：《北京工业大学》2016年硕士论文　论文类型：学位论文

【摘要】：垂直腔面发射激光器(Vertical-cavity surface-emitting lasers,VCSEL)耦合阵列具有高亮度、近衍射限制高质量光束、单一模式激射、相位锁定等特性优势,可在激光雷达、光束可操控光源、光谱传感、光逻辑处理等领域得到充分应用。本文研究耦合VCSEL阵列的光束操控,通过改变各单元的注入电流控制光束偏转,以获得激光束的高速连续高精度扫描。首先报告了耦合VCSEL阵列及光束操控的研究现状,对光束操控原理进行了研究,根据已有的研究基础进行实验方案设计,然后对设计方案模拟验证光束操控原理,改进工艺流程,最终制备出较高耦合度和较大操控角度的器件,并设计得到完整测试方案。主要研究工作总结如下:1.实验方案设计和模拟进行光束操控之前,首先要获得高光束质量,根据本课题组对耦合VCSEL阵列等已有的研究成果,确定了1×2和1×3两种阵列结构的实验方案。为更好的研究光束操控的机理,先使用COMSOL Multiphysics模拟器件中电场和热场相互耦合后的分布,然后使用FDTD Solutions分别模拟折射率、初始相位差以及不同单元大小和间距对耦合光束在远场偏转情况的影响。2.工艺制备流程由器件设计方案并结合实验室的工艺条件进行实验制备流程和光刻版图的设计,并通过实际器件制备过程中遇到的问题对实验流程进一步优化。通过引入金属纳米层作为电流扩展层,提高了可靠性,同时保证了各单元电流的分别注入。最终确定完整的一套耦合VCSEL阵列光束操控器件的制备工艺。3.测试数据分析对样品器件的近场、远场、光功率和光谱进行了系统和详细的测试。对1×2阵列的近场测试数据进行对比,发现单元间距对耦合电流的影响规律;对1×3阵列的近场测试发现耦合时注入电流低于阈值电流并且三单元耦合比两单元耦合时的注入电流更低,并对此进行了解释。然后通过光功率和光谱的测试对比相同条件下的近场和远场数据,光束操控过程中的光功率和光谱都由耦合效率影响。根据测试分析,得到一种完善耦合VCSEL阵列光束操控器件的测试方案。
[Abstract]:Vertical-cavity surface-emitting laserser (VCSELL) coupled array has the advantages of high brightness, near diffraction limiting high quality beam, single mode excitation, phase locking and so on. It can be used in lidar, laser beam can control light source, spectrum sensor, etc. Optical logic processing and other fields have been fully applied. In this paper, the beam manipulation of coupled VCSEL array is studied, and the beam deflection is controlled by changing the injection current of each unit. In order to obtain high speed, continuous and high precision scanning of laser beam, the research status of coupled VCSEL array and beam manipulation is reported. The principle of beam control is studied, and the experimental scheme is designed according to the existing research basis. Then the design scheme is simulated to verify the principle of beam control and improve the technological process. Finally, the devices with high coupling degree and larger control angle are fabricated. The main research work is summarized as follows: 1. Before the experimental scheme is designed and simulated, the high beam quality should be obtained. According to the existing research results of the coupled VCSEL array and so on, The experimental schemes of 1 脳 2 and 1 脳 3 array structures are determined. In order to better study the mechanism of beam control, the distribution of electric field and thermal field in the device is simulated by COMSOL Multiphysics first, and then the refractive index is simulated by FDTD Solutions. The effect of initial phase difference and different unit size and spacing on the deflection of coupling beam in the far field. 2. The process of fabrication is designed by the device design scheme and the experimental preparation process and lithography design combined with the process conditions in the laboratory. The experimental process is further optimized through the problems encountered in the fabrication of practical devices. The reliability is improved by introducing metal nanolayers as current extension layers. At the same time, the injection of each unit current is ensured. Finally, a complete set of fabrication technology of the coupled VCSEL array beam control device is determined. 3. The near field and far field of the sample device are analyzed by the test data. The optical power and spectrum are measured systematically and in detail. By comparing the near-field data of 1 脳 2 array, the effect of cell spacing on coupling current is found. The near-field test of 1 脳 3 array shows that the injection current is lower than the threshold current and the three-unit coupling is lower than the two-element coupling. Then the near field and far field data under the same conditions are compared with optical power and spectrum. The optical power and spectrum during beam manipulation are affected by coupling efficiency. A perfect test scheme of coupled VCSEL array beam control device is presented.
【学位授予单位】：北京工业大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TN248

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