空间光调制器像素尺寸对非球面检测误差影响分析

发布时间：2018-04-22 09:23

本文选题：测量 + 非球面检测　；参考：《中国激光》2017年01期

【摘要】：空间光调制器(SLM)可以在电驱动等信号控制下,实时调节振幅、相位、偏振态等信息,近年来已被尝试用于代替计算全息(CGH)板实现非球面检测。SLM像素尺寸在3.5~20μm,远大于CGH板刻蚀分辨率,使得SLM的相位调制量在像素尺度离散化,与理想的连续相位存在误差,带来检测精度的降低。因此,有必要评估SLM像素尺寸对检测精度的影响,从而选择合适像素尺寸的SLM。基于菲涅耳衍射原理以及快速傅里叶变换算法,仿真波面经SLM调制并传播到待测表面的过程,并探究待测面处生成波面精度与SLM像素尺寸大小之间的关系。对多组波面进行仿真并分析波面误差分布发现,SLM生成补偿波面误差与SLM像素尺寸所能表示的最大频率相关,检测时需保证SLM像素尺寸所能表示的最大频率大于补偿波面频率最大值。
[Abstract]:Spatial light modulator (SLM) can adjust amplitude, phase, polarization state and other information in real time under the control of electric drive and other signals. In recent years, it has been tried to replace the CGH board to realize the.SLM pixel size of aspherical detection in 3.5~20 mu m, which is far greater than the resolution of CGH plate etching, so that the phase modulation of SLM is discretized in the pixel scale. Therefore, it is necessary to evaluate the effect of SLM pixel size on detection precision, so that SLM. based on the Fresnel diffraction principle and fast Fourier transform algorithm are selected to simulate the process of the wave surface modulated by SLM and spread to the surface, and to explore the surface of the test surface. The relationship between the wavefront accuracy and the size of the SLM pixel is generated. The simulation of multiple sets of wavefront and the analysis of the distribution of the wavefront error find that the SLM generated compensation wave surface error is related to the maximum frequency of the SLM pixel size, and the maximum frequency of the SLM pixel size is greater than the maximum of the compensation wave plane.

【作者单位】：中国科学院上海光学精密机械研究所强激光材料重点实验室;中国科学院大学;
【基金】：国家自然科学基金青年科学基金(11602280)
【分类号】：TN761

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