基于SOI微环谐振腔的可调谐外腔半导体激光器研究

发布时间：2018-05-20 05:24

本文选题：热调谐级联双环谐振腔 + 热光效应　；参考：《浙江大学》2015年硕士论文

【摘要】：随着光通信技术的快速发展,半导体激光器作为光源,在光纤通信系统和光交换系统中有着重要的地位。外腔激光器相比于普通半导体激光器,其线宽更窄,波长调谐范围更宽,有较小的啁啾,具有优良的光谱特性,所以一直是研究热点。本课题中提出了基于热调谐微环谐振腔的外腔半导体激光器,主要介绍了热调谐微环谐振腔和外腔准直光路的设计。本文中首先介绍了微环谐振腔的基本理论和传输函数,以及固体传热理论,详细分析了SO1波导的模场分布。硅材料具有较大的热光系数,能够很好地应用于热调谐,以此设计了热调谐级联双环谐振腔。本文分析了热调谐级联双环谐振腔的性能,其利用游标效应增加了波长漂移范围,增大了热调谐范围及热调谐效率。接着详细介绍了热调谐级联双环谐振腔的制作工艺流程,制作主要分为级联双环谐振腔和微加热器两个部分,详细介绍了电子束光刻、刻蚀、薄膜沉积、接触式光刻等工艺；接着介绍了端面耦合的芯片测试平台搭建和测试流程,测试了单环和双环谐振腔的输出端透射谱曲线。最后详细介绍了自聚焦透镜的特性。利用两个自聚焦透镜建立准直光路,将热调谐级联双环谐振腔和FP腔组合连接,建立外腔激光器,其可以实现窄线宽输出。
[Abstract]:With the rapid development of optical communication technology, semiconductor lasers, as light sources, play an important role in optical fiber communication systems and optical switching systems. Compared with conventional semiconductor lasers, external cavity lasers have narrower linewidth, wider wavelength tuning range, smaller chirp and better spectral characteristics. In this paper, an external cavity semiconductor laser based on thermally tuned microring resonator is proposed, and the design of thermal tuned microring resonator and collimation optical path is introduced. In this paper, the basic theory and transfer function of microring resonator and the theory of solid heat transfer are introduced, and the mode field distribution of SO1 waveguide is analyzed in detail. Silicon has a large thermo-optical coefficient and can be well applied to thermal tuning. Based on this, a thermotuning cascade double-ring resonator is designed. In this paper, the performance of thermal tuning cascade double ring resonators is analyzed. The range of wavelength shift, the thermal tuning range and the thermal tuning efficiency are increased by using the Vernier effect. Then the fabrication process of thermal tuned double ring resonator is introduced in detail, which is mainly divided into two parts: cascade double ring resonator and micro heater. The processes of electron beam lithography, etching, thin film deposition and contact lithography are introduced in detail. Then the end coupling chip test platform and test flow are introduced. The transmission spectrum curves of the output end of single and double ring resonators are tested. Finally, the characteristics of self-focusing lens are introduced in detail. Two self-focusing lenses are used to establish collimating optical path. The thermal tuning cascade double-ring resonator and FP cavity are combined to establish the external cavity laser. The output of narrow linewidth can be realized.
【学位授予单位】：浙江大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN248.4

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