石墨烯互连线的串扰特性研究

发布时间：2018-06-14 13:35

本文选题：单层石墨烯 + 多层石墨烯　；参考：《西安电子科技大学》2015年硕士论文

【摘要】：随着近年来集成电路的不断发展,集成电路互连线的问题日益凸显,而当超大规模集成电路的工艺技术进入纳米级别(100nm)时,互连线的问题将成为更为严重的问题,如散热问题、金属电阻率的增加、可靠性问题等。国际半导体技术蓝图预测,随着集成电路特征尺寸的不断减小,铜互连线中电子的表面散射和晶格振动散射将加剧,这会导致铜互连线的电阻率急剧增加,进而使信号的完整性受到严重影响。由于在信号完整性方面,互连线的问题相比于门的问题所占比重越来越大,因此研究互连线间的串扰也就显得尤其重要。碳纳米材料中的碳纳米管和石墨烯由于具有优良的电学、热学和力学特性,一直都被认为是很有潜力的互连材料。由于石墨烯在水平方向可控性好,而且同尺寸下导电沟道数目要高于碳纳米管,所以石墨烯在应用于互连领域或许会比碳纳米管更具优势。本文利用量子电子理论相关知识,结合石墨烯的能带结构,对单层石墨烯的参数进行了等效提取,并建立了等效单导体模型,进而又得到了考虑了互连线间耦合的等效电路模型,在此基础上对三根单层石墨烯间的串扰进行研究,得到了串扰和相关参数之间的关系。另外,本文根据单层石墨烯的相关结论进一步提取了多层石墨烯的等效电路参数,等效电路参数的提取过程考虑了各层间的耦合作用。之后,本文采用ITRS2013的参数,利用互连线模型研究了多层石墨烯互连线在21nm和14nm节点下串扰对信号传输的影响。通过仿真,多层石墨烯用作全局层互连线时比用作局部层互连线时,串扰会更弱一些,并且14nm和21nm工艺中相邻多层石墨烯互连线间的串扰不会对信号传输造成误判影响,互连线的信号输出能保证较好的完整性。本文分析了石墨烯在未来集成电路互连领域中的应用,提出的等效电路模型和讨论的结果对于将来石墨烯互连线的理论分析具有参考意义,而且对于将来石墨烯的制备工艺也具有指导价值。
[Abstract]:With the continuous development of integrated circuits in recent years, the problem of integrated circuit interconnection has become increasingly prominent. However, when the process technology of VLSI enters the nanometer level of 100nm), the interconnection problem will become a more serious problem, such as heat dissipation. Increases in electrical resistivity of metals, reliability problems, etc. The international semiconductor blueprint predicts that the surface scattering of electrons and the lattice vibration scattering in copper interconnects will increase with the decreasing of IC characteristic size, which will lead to a sharp increase in the resistivity of copper interconnects. Furthermore, the integrity of the signal is seriously affected. Because the problem of interconnect is more and more important than the problem of gate in signal integrity, it is very important to study the crosstalk between interconnects. Carbon nanotubes (CNTs) and graphene (graphene) have been considered as potential interconnection materials for their excellent electrical, thermal and mechanical properties. Because graphene has good controllability in horizontal direction and the number of conducting channels is higher than that of carbon nanotubes at the same size, graphene may be more advantageous than carbon nanotubes in the field of interconnection. In this paper, the parameters of graphene monolayer are extracted by using the knowledge of quantum electron theory and the energy band structure of graphene, and an equivalent single conductor model is established. Then the equivalent circuit model considering the coupling between interconnects is obtained. The crosstalk between three monolayer graphene is studied and the relationship between crosstalk and related parameters is obtained. In addition, the equivalent circuit parameters of the multilayer graphene are further extracted according to the conclusions of the monolayer graphene, and the coupling between the layers is considered in the extraction process of the equivalent circuit parameters. Then, using the parameters of ITRS2013, the influence of crosstalk on signal transmission under 21nm and 14nm nodes is studied by using the interconnect line model. By simulation, the crosstalk is weaker when multilayer graphene is used as global layer interconnection line than as local layer interconnection line, and the crosstalk between adjacent multilayer graphene interconnect lines in 14nm and 21nm process will not cause misjudgment to signal transmission. The interconnect signal output can guarantee better integrity. In this paper, the application of graphene in the field of integrated circuit interconnection in the future is analyzed. The equivalent circuit model and the results discussed are of reference significance for the theoretical analysis of graphene interconnects in the future. It is also valuable for the preparation of graphene in the future.
【学位授予单位】：西安电子科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN405.97;O613.71

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