高速高精度平面定位平台的研究

发布时间：2018-06-19 12:28

本文选题：运动学 + 机构特性　；参考：《哈尔滨工业大学》2015年硕士论文

【摘要】：随着移动互联网的快速发展,IC产业在国内也得到了迅速发展,从而对于IC设备的需求也日益增加。但是国内的设备主要依靠进口,同时,高端设备对我国禁运,从而导致成本增加。因此,展开对高速高精度平面定位平台的研究具有深远的战略意义。本文首先通过对现有的高速高精度机构进行分析研究,依据半导体封装设备的任务要求及技术指标,采用一种适应于高速高精场合的平面2自由度并联机器人。采用闭环矢量法对机构的运动学进行详细地分析推导,得到其正解及逆解,在此基础之上,对机构的速度及加速度特性进行研究,根据其任务要求规划定位平台的速度加速度,并分析定位平台的工作空间。基于雅克比矩阵对高速高精度平面定位平台的灵巧度和奇异性等运动学特性进行研究,分析机构的奇异特性,为后期规避奇异位型做理论基础。基于雅克比矩阵建立灵巧度的性能指标,研究不同构型下定位平台的灵巧度分布特性,从而选择合适的机构构型。基于拉格朗日方法建立高速高精度平面定位平台的刚体动力学模型,并利用MATLAB进行数值仿真分析其动力学特性。在刚体动力学的基础上建立机器人的弹性动力学,并应用精细积分法求取末端定位平台的动态响应的数值解,研究定位平台的弹性变形对于定位精度的影响,并研究其固有频率特性,达到避开激振频率的目的。深入研究了混沌理论,并将其应用于机器人的参数优化。通过对现有的几种典型的混沌序列的遍历性进行比较研究,提出遍历性的指标,比较各个混沌序列的优劣性,选择适用于混沌优化的序列,对现有的混沌优化算法进行分析研究,分析其存在的缺陷,针对易陷入局部最优解及搜索空间不变等缺陷提出对应的改进措施,从而提高算法的准确性和效率,利用改进的混沌算法对机构的尺寸参数进行优化。
[Abstract]:With the rapid development of mobile Internet, the IC industry has also been developed rapidly in China, so the demand for IC equipment is increasing day by day. But the domestic equipment mainly depends on the import, at the same time, the high-end equipment to our country embargo, thus causes the cost to increase. Therefore, the research on high-speed and high-precision plane positioning platform has profound strategic significance. Based on the analysis and research of the existing high speed and high precision mechanism, according to the task requirements and technical specifications of semiconductor packaging equipment, a planar 2 DOF parallel robot suitable for high speed and high precision situations is adopted in this paper. The kinematics of the mechanism is analyzed and deduced in detail by using the closed-loop vector method, and the forward and inverse solutions are obtained. On the basis of this, the velocity and acceleration characteristics of the mechanism are studied, and the acceleration of the positioning platform is planned according to the requirements of the task. The workspace of the positioning platform is analyzed. Based on the Jacobian matrix, the kinematics characteristics of high-speed and high-precision planar positioning platform such as dexterity and singularity are studied, and the singularity characteristics of the mechanism are analyzed, which is the theoretical basis for avoiding the singular bit type in the later stage. Based on the Jacobian matrix, the performance index of dexterity is established, and the distribution characteristics of dexterity of positioning platform under different configurations are studied, and the appropriate mechanism configuration is selected. Based on Lagrange method, the rigid body dynamics model of high speed and high precision plane positioning platform is established, and its dynamic characteristics are analyzed numerically by MATLAB. On the basis of rigid body dynamics, the elastic dynamics of the robot is established, and the numerical solution of dynamic response of the terminal positioning platform is obtained by using the precise integration method, and the influence of the elastic deformation of the positioning platform on the positioning accuracy is studied. The characteristic of its natural frequency is studied to avoid the exciting frequency. The chaos theory is studied and applied to the optimization of robot parameters. By comparing and studying the ergodicity of several typical chaotic sequences, the index of ergodicity is put forward, the advantages and disadvantages of each chaotic sequence are compared, and the sequences suitable for chaos optimization are selected. This paper analyzes and studies the existing chaos optimization algorithm, analyzes its defects, and puts forward corresponding improvement measures for the defects such as easy to fall into the local optimal solution and invariant search space, so as to improve the accuracy and efficiency of the algorithm. The improved chaotic algorithm is used to optimize the dimension parameters of the mechanism.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN405

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