基于时序推延的线阵CCD动态位移测量方法研究

发布时间：2018-06-24 03:00

本文选题：测量 + 线阵CCD　；参考：《光学学报》2016年02期

【摘要】：针对传统线阵CCD测量方法仅适用于静态图像采集或低速位移测量的问题,在分析CCD动态测量过程中动态误差产生原因的基础上,提出一种驱动时序互相推延的多个CCD同步测量方法。该方法实现了在一个积分周期内的等时间多个位移值测量,等效于减少单个CCD积分时间,从而提高线阵CCD的动态测量范围。设计了一个由5个线阵CCD沿圆周均布的,时序推延的角位移传感器,并完成相应实验系统的搭建。通过与高精度圆光栅在不同速度下动态误差的检定,得出随着运动速度的提高,时序推延测量方法的动态特性要明显优于传统测量方法。结果表明,时序推延测量法在30 r/min时与传统方法 10 r/min的动态误差水平相当,验证了时序推延测量方法对提高CCD动态特性的可行性。
[Abstract]:Aiming at the problem that the traditional linear CCD measurement method is only suitable for static image acquisition or low speed displacement measurement, the causes of dynamic errors in CCD dynamic measurement are analyzed. In this paper, a synchronous measurement method of multiple CCD is presented, which drives time series to delay each other. This method realizes the measurement of multiple displacement values at equal time in one integral period, which is equivalent to reducing the integral time of a single CCD, thus increasing the dynamic measurement range of linear CCD. An angular displacement sensor with five linear CCD arrays distributed evenly along the circumference is designed and the corresponding experimental system is built. By verifying the dynamic error of circular grating with high accuracy at different velocities, it is concluded that the dynamic characteristics of the time-series delay measurement method are obviously superior to the traditional measurement method with the increase of the moving velocity. The results show that the dynamic error level of the time series delay measurement method at 30 r/min is equal to that of the traditional method at 10 r/min. The feasibility of the timing delay measurement method to improve the dynamic characteristics of the CCD is verified.
【作者单位】：重庆理工大学机械检测技术与装备教育部工程研究中心时栅传感及先进检测技术重庆市重点实验室;
【基金】：国家自然科学基金(51505053,51505052) 国家重大科学仪器设备开发专项(2013YQ220893) 重庆市基础科学与前沿技术研究专项项目(cstc2015jcyj A1467)
【分类号】：TN386.5

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