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双工件台软件设计及晶圆传输系统的应用

发布时间:2018-08-17 14:41
【摘要】:双工件台是光刻机运动控制系统的核心部件,双工件台的运动由多个电机共同驱动。由于双工件台是高速运行的平台,这样使得双工件台伺服控制系统对实时性要求极高。晶圆传输升降机构在双工件台中负责晶圆的上下片,其动态性能和稳态误差影响光刻机的产率和晶圆硅片质量。本文主要针对双工件台嵌入式上下位机进行设计,并对晶圆传输升降机构进行了运动控制研究。首先,针对双工件台的功能需求,确定异构平台的上下位机系统的软件总体架构。对下位机Vxworks嵌入式系统结构进行详细介绍,并设计了嵌入式主控CPU板与多块运动控制卡间的通信机制;接下来对下位机Vxworks嵌入式系统进行任务规划,包括Vxworks嵌入式系统任务间同步与通信,任务间调度等任务,最后具体实现下位机嵌入式的多任务实时系统。其次,基于MFC开发了上位机界面,对异构平台的大小端模式进行研究,解决了上下位机的数据传输问题,最后基于功能需要详细介绍了上位机程序设计,并通过实验,验证了上位机的正确性。再次,针对晶圆升降机构控制系统进行软硬件介绍,设计了包括传感器模块、信号采集卡在内的硬件电路,并对运动控制卡的软件进行了设计,最后验证各功能模块的正确性。最后,利用搭建的软硬件平台,进行晶圆升降控制系统实验,设计基于前馈控制的PID控制算法,通过实物验证控制系统的正确性。
[Abstract]:Double workpiece table is the core part of motion control system of lithography machine. The motion of double workpiece table is driven by multiple motors. Because the double workpiece platform is a high speed running platform, the servo control system of double workpiece platform requires high real-time performance. Wafer transport lift mechanism is responsible for wafer up-and-down in double workpiece table. Its dynamic performance and steady-state error affect the production rate of lithography machine and wafer quality. In this paper, a dual workpiece embedded upper and lower machine is designed, and the motion control of wafer transmission lifting mechanism is studied. Firstly, the software architecture of the upper and lower computer system of the heterogeneous platform is determined according to the functional requirements of the dual workpiece platform. The architecture of Vxworks embedded system is introduced in detail, and the communication mechanism between embedded master CPU board and motion control card is designed. Then, the task planning of Vxworks embedded system is carried out. It includes the tasks of synchronization and communication between tasks in Vxworks embedded system, inter-task scheduling and so on. Finally, the multi-task real-time system of embedded lower computer is implemented. Secondly, the upper computer interface is developed based on MFC, and the model of large and small end of heterogeneous platform is studied, which solves the problem of data transmission between upper and lower computers. Finally, the program design of upper computer is introduced in detail based on the need of function, and the experiment is carried out. The correctness of the upper computer is verified. Thirdly, the hardware and software of the wafer lifting mechanism control system are introduced, the hardware circuit including sensor module and signal acquisition card is designed, and the software of motion control card is designed. Finally, the correctness of each function module is verified. Finally, using the software and hardware platform, the experiment of wafer lifting control system is carried out, and the PID control algorithm based on feedforward control is designed, and the correctness of the control system is verified by physical object.
【学位授予单位】:哈尔滨工业大学
【学位级别】:硕士
【学位授予年份】:2015
【分类号】:TN305.7

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