LD侧面泵浦Nd:YAG高功率紫外激光器

发布时间：2018-10-31 14:25

【摘要】：全固态紫外激光器有以下优点:结构紧凑、工作稳定、寿命长等,在众多领域如军用、工业制造及科学研究都有广阔的应用前景,特别在精密加工应用。UV激光具有高光子能量,能够使分子键迅速断裂,不对物质产生多余热量,即“冷加工”,这种加工方法精度高、速度快,在电子、生物工程等领域应用广泛,其中355nm全固态紫外激光器是紫外光源中使用频率最高的。全固态紫外激光器有端面泵浦和侧面泵浦两种常见结构,与侧面泵浦相比,端面泵浦的转换效率更高、输出光束的质量更好,多数商业化全固态紫外激光器采用此种结构,国内华日等几家公司都开发了激光二极管(LD)光纤耦合端面泵浦的商用355nm紫外激光器。侧面泵浦虽然效率略低,但结构紧凑,模块标准化,成本低,易实现高功率输出。本文充分利用侧面泵浦激光器的功率优势,采用标准化细棒径侧面泵浦的耦合模块,通过谐振腔模拟优化基模振荡光束与晶体棒直径匹配实现激光器近基模输出,并通过腔内倍频、和频设计了结构简单,功率较高,成本低,光束质量近基模的355nm紫外激光器,在紫外激光工程化应用方面实现创新,大大促进紫外激光器的发展,使其应用前景更加广阔。本文分析了LD侧面泵浦全固态Nd:YAG紫外激光器的相关理论并研究了其相对应的实验部分。应用矩阵理论模拟了谐振腔内振荡光束的模式,控制晶体棒径与激光器谐振腔优化相结合控制光束质量,采用腔内倍频和频提高激光系统谐波转化效率,分析并设计了温度控制系统;根据理论分析采用Nd:YAG标准化LD泵浦耦合模块设计了激光实验系统,分别进行了基频激光、倍频激光和355nm紫外激光实验研究,分析了泵浦功率、Q开关频率等相关参数与输出激光之间的关系;在输入电功率为280W,调制频率为40k Hz时,355nm紫外激光的最高输出功率为10.58W,激光脉冲宽度为20ns,M2=1.3。理论及实验研究表明,近基模高功率355nm紫外激光的输出可以通过侧面泵浦腔内倍频、和频来实现,此种紫外激光器结构简单、成本低,对紫外激光的工程应用发展具有重要意义。
[Abstract]:All-solid-state UV lasers have the following advantages: compact structure, stable operation, long life and so on. They have broad application prospects in many fields such as military, industrial manufacturing and scientific research. Especially in precision machining applications. UV laser has high photon energy, can make the molecular bond break quickly, do not produce excess heat to the matter, that is, "cold working", this kind of processing method has high precision, high speed, in electron, Bioengineering is widely used, among which 355nm all-solid-state UV laser is the most frequently used ultraviolet laser. There are two common structures of end-pumped and side-pumped all-solid-state UV lasers. Compared with side-pumped lasers, end-pumped lasers have higher conversion efficiency and better output beam quality. Most commercial all-solid-state UV lasers use this structure. Several domestic companies, such as Huari, have developed a commercial 355nm ultraviolet laser pumped by (LD) fiber coupling end-pumped laser diode. Although the side-pumping efficiency is a little low, the structure is compact, the module is standardized, the cost is low, and the high power output is easy to be realized. In this paper, we make full use of the power advantage of side-pumped laser, adopt the coupling module of standard fine rod diameter side-pumped, and optimize the matching between the fundamental mode oscillation beam and the crystal rod diameter through the resonator simulation to realize the near-base mode output of the laser. The 355nm UV laser with simple structure, high power, low cost and near-base mode beam quality is designed by intracavity frequency doubling. The invention in the engineering application of ultraviolet laser has greatly promoted the development of ultraviolet laser. Make its application foreground more broad. In this paper, the theory of LD side-pumped all-solid-state Nd:YAG ultraviolet laser is analyzed and its corresponding experimental part is studied. The mode of oscillating beam in resonator is simulated by matrix theory. The beam quality is controlled by combining the control of crystal rod diameter with the optimization of laser resonator, and the harmonic conversion efficiency of laser system is improved by intracavity frequency doubling and frequency summation. The temperature control system is analyzed and designed. Based on the theoretical analysis, the laser experimental system is designed using Nd:YAG standardized LD pump coupling module. The fundamental frequency laser, frequency-doubling laser and 355nm ultraviolet laser are studied respectively, and the pump power is analyzed. The relationship between Q switching frequency and output laser; When the input power is 280 W and the modulation frequency is 40 k Hz, the maximum output power and pulse width of the 355nm ultraviolet laser are 10.58 W and 1.3, respectively. Theoretical and experimental studies show that the output of near-base mode high power 355nm ultraviolet laser can be achieved by side-pumped intracavity frequency doubling and sum frequency. The structure of the ultraviolet laser is simple and the cost is low. It is of great significance to the development of engineering application of ultraviolet laser.
【学位授予单位】：湖北工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN248

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