基于自动聚焦技术的探针台Z向距离测量系统
发布时间：2019-01-24 10:55
【摘要】：晶圆测试是半导体制造的一道重要工序,而探针台是晶圆测试的核心装备,其研究与开发受到越来越多的重视,其中探针台Z向距离测量是保证晶圆与探针正确对针的前提。本文结合某公司项目开展了基于自动聚焦技术的探针台Z向距离测量系统的研究,完成了探针台Z向距离测量系统的总体设计并对其关键技术进行了研发。全文主要内容包括:第一章:分析了探针台的研究现状,总结了探针台自动聚焦技术及Z向距离测量技术的发展状况,给出了本文研究内容。第二章:分析了基于自动聚焦技术的探针台Z向距离测量原理,给出了基于自动聚焦技术的探针台Z向距离测量系统的总体方案,并对系统的视觉模块、光学模块、运动控制模块等关键模块进行了详细设计。第三章:探讨了自动聚焦清晰度评价准则,对比分析了时域法、频域法、熵函数法三大类图像清晰度评价算法,在此基础上提出了改进的四方向模板Sobel算法,该算法具有较高的灵敏度和计算效率,可以达到快速精准聚焦的目的。第四章:研究了融合窗口选择与极值点搜索的自动聚焦加速算法,首先基于图像的灰度直方图特性,有效分离了背景与特征信息,实现像素特征窗口的选择;接着对极值点搜索算法中的爬山算法进行改进,采用自适应变步长的搜索方式,之后对峰值附近的6点做曲线拟合,选取曲线中最大的值即为准焦位置处。第五章:开发了基于自动聚焦技术的探针台Z向距离测量原型系统,从系统实现层面出发,通过主动视觉标定建立了图像像素坐标与三维空间坐标的联系。利用晶圆样片,对探针台Z向距离测量系统进行30次重复实验,验证了该系统的高精度及稳定性。第六章:总结了全文的主要工作和研究内容;对论文的下一步研究工作进行了展望。
[Abstract]:Wafer testing is an important process in semiconductor manufacturing, and probe table is the core equipment of wafer testing. More and more attention has been paid to its research and development. The Z direction distance measurement is the prerequisite to ensure the correct alignment between wafer and probe. In this paper, the research of Z direction distance measurement system of probe station based on automatic focusing technology is carried out, the overall design of Z direction distance measurement system of probe station is completed and the key technology is researched and developed. The main contents of this paper are as follows: chapter 1: the research status of the probe platform is analyzed, the development of the automatic focusing technology and the Z direction distance measurement technology are summarized, and the research content of this paper is given. Chapter 2: the principle of Z direction distance measurement of probe station based on auto focusing technology is analyzed, and the overall scheme of Z direction distance measurement system based on auto focusing technology is given. The vision module and optical module of the system are also given. The key modules such as motion control module are designed in detail. In chapter 3, we discuss the criterion of automatic focus definition evaluation, and compare and analyze three kinds of image definition evaluation algorithms, such as time domain method, frequency domain method and entropy function method. On this basis, an improved four-direction template Sobel algorithm is proposed. The algorithm has high sensitivity and computational efficiency, and can achieve the purpose of fast and accurate focusing. Chapter 4: the automatic focusing acceleration algorithm of fusion window selection and extremum search is studied. Firstly, based on the gray histogram characteristics of image, the background and feature information are effectively separated to realize the selection of pixel feature window. Then we improve the mountain climbing algorithm in the extreme point search algorithm, adopt the adaptive variable step size search method, and then do the curve fitting for the 6 points near the peak value, and select the largest value in the curve, that is, the quasi-focal position. Chapter 5: the prototype system of Z direction distance measurement of probe station based on automatic focusing technology is developed. From the level of system realization, the connection between pixel coordinate and 3D coordinate is established through active visual calibration. The high precision and stability of the system are verified by 30 repeated experiments on the Z direction distance measurement system of the probe station using wafer samples. Chapter 6: summarizes the main work and research contents of the thesis, and looks forward to the next research work of the thesis.
【学位授予单位】：浙江大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN305;TP391.41
本文编号：2414416
[Abstract]:Wafer testing is an important process in semiconductor manufacturing, and probe table is the core equipment of wafer testing. More and more attention has been paid to its research and development. The Z direction distance measurement is the prerequisite to ensure the correct alignment between wafer and probe. In this paper, the research of Z direction distance measurement system of probe station based on automatic focusing technology is carried out, the overall design of Z direction distance measurement system of probe station is completed and the key technology is researched and developed. The main contents of this paper are as follows: chapter 1: the research status of the probe platform is analyzed, the development of the automatic focusing technology and the Z direction distance measurement technology are summarized, and the research content of this paper is given. Chapter 2: the principle of Z direction distance measurement of probe station based on auto focusing technology is analyzed, and the overall scheme of Z direction distance measurement system based on auto focusing technology is given. The vision module and optical module of the system are also given. The key modules such as motion control module are designed in detail. In chapter 3, we discuss the criterion of automatic focus definition evaluation, and compare and analyze three kinds of image definition evaluation algorithms, such as time domain method, frequency domain method and entropy function method. On this basis, an improved four-direction template Sobel algorithm is proposed. The algorithm has high sensitivity and computational efficiency, and can achieve the purpose of fast and accurate focusing. Chapter 4: the automatic focusing acceleration algorithm of fusion window selection and extremum search is studied. Firstly, based on the gray histogram characteristics of image, the background and feature information are effectively separated to realize the selection of pixel feature window. Then we improve the mountain climbing algorithm in the extreme point search algorithm, adopt the adaptive variable step size search method, and then do the curve fitting for the 6 points near the peak value, and select the largest value in the curve, that is, the quasi-focal position. Chapter 5: the prototype system of Z direction distance measurement of probe station based on automatic focusing technology is developed. From the level of system realization, the connection between pixel coordinate and 3D coordinate is established through active visual calibration. The high precision and stability of the system are verified by 30 repeated experiments on the Z direction distance measurement system of the probe station using wafer samples. Chapter 6: summarizes the main work and research contents of the thesis, and looks forward to the next research work of the thesis.
【学位授予单位】：浙江大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN305;TP391.41
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