步进式压电驱动直线运动系统的研究

发布时间：2019-03-20 07:43

【摘要】：伴随着光纤对接、自适应光学等现代精密产业的快速发展,精密运动平台的研究已经成为这些领域进一步深入研究的关键支撑。针对精密运动平台不同的驱动要求,产生了各式各样新型的驱动器。步进式压电驱动器是一种新型驱动器,具有行程大、分辨力高、结构简单、响应迅速、操作稳定及不受电磁干扰等优点。因此建立起以步进式压电驱动器为核心的直线运动系统对该类驱动器的研究及在运动平台中的实际应用具有重要的意义。本文首先提出了一种双足步进式压电驱动器的基本构型,分析了驱动器的致动原理,规划出致动元件的动作时序,设计了驱动器的两种结构方案。为对驱动器的结构进行分析,建立了箝位力分析的等效模型,推导出箝位力计算公式。使用有限元仿真软件ANSYS对驱动器进行分析,从而确定了驱动器的结构方案与具体结构参数。相关分析为双足步进式压电驱动器的设计提供了理论基础。针对双足步进式压电驱动器的实际驱动要求,本文研制了对应的驱动电源与运动控制系统,用于对驱动器的驱动与运动状态的控制。驱动电源由正负直流电压供电电路与线性放大电路组成,具有四路电压、频率、相位差均可调的驱动信号输出能力,且输出的驱动信号可由输入的控制信号实现控制。驱动电源测试结果表明,输出电压在±200V范围内,且具有良好的线性度与驱动能力。运动控制系统使用Matlab的Simulink Real-Time工具包进行开发,可输出四路控制信号,并具有位置检测功能,实现对驱动器运动状态的实时控制。最后,本文完成了步进式压电驱动直线运动系统的搭建,系统主要由双足步进式压电驱动器、驱动电源与运动控制系统组成。对双足步进式压电驱动器的机械输出特性及直线运动系统的运动特性进行了测试,实验验证了等效模型建立的正确性,并为运动控制程序的设计提供了数据支撑。实验结果表明,驱动器的最大驱动力为13.2N,最大平均速度为47.6μm/s。通过对位置信息进行测量与采集,运动控制系统可通过变步距实现直线运动系统的定位控制,步进式工作模式下,定位精度为±1μm。
[Abstract]:With the rapid development of optical fiber docking, adaptive optics and other modern precision industries, the research of precision motion platform has become the key support for further research in these fields. According to the different driving requirements of precision motion platform, a variety of new drivers have been produced. Stepping piezoelectric actuator is a new type of actuator, which has the advantages of large stroke, high resolution, simple structure, quick response, stable operation and no electromagnetic interference. Therefore, the establishment of a linear motion system with stepping piezoelectric actuator as the core is of great significance to the research of this kind of actuator and its practical application in the motion platform. In this paper, the basic configuration of a biped step piezoelectric actuator is proposed, the actuation principle of the actuator is analyzed, the action time sequence of the actuator is programmed, and two kinds of structure schemes of the actuator are designed. In order to analyze the structure of the actuator, the equivalent model of the clamping force analysis is established, and the calculating formula of the clamping force is derived. The finite element simulation software ANSYS is used to analyze the driver, and the structure scheme and specific structure parameters of the driver are determined. The correlation analysis provides a theoretical basis for the design of bipedal piezoelectric actuator. According to the actual driving requirements of biped stepping piezoelectric actuator, the corresponding driving power supply and motion control system are developed in this paper, which can be used to control the drive and motion state of the actuator. The driving power supply consists of a positive and negative DC voltage power supply circuit and a linear amplifier circuit. It has the ability to output the drive signal with adjustable four-channel voltage, frequency and phase difference, and the output drive signal can be controlled by the input control signal. The test results of driving power supply show that the output voltage is in the range of 卤200V, and it has good linearity and driving ability. The motion control system is developed with the Simulink Real-Time toolkit of Matlab. It can output four control signals and has the function of position detection to realize the real-time control of the motion state of the driver. Finally, the linear motion system of step-by-step piezoelectric drive is built. The system consists of bipedal piezoelectric actuator, driving power supply and motion control system. The mechanical output characteristics of biped stepping piezoelectric actuator and the motion characteristics of linear motion system are tested. The experimental results verify the correctness of the equivalent model and provide data support for the design of motion control program. The experimental results show that the maximum driving force of the driver is 13.2N and the maximum average speed is 47.6 渭 m / s. By measuring and collecting the position information, the motion control system can realize the position control of the linear motion system by changing the step distance. Under the step mode, the positioning precision is 卤1 渭 m.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN384

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