带电粒子环境下低真空度测试技术研究

发布时间：2018-03-08 10:41

本文选题：真空测量　切入点：带电粒子　出处：《合肥工业大学》2015年硕士论文　论文类型：学位论文

【摘要】：在化工、制药等一些特殊真空环境中,含有大量带电粒子及饱和水蒸气,常见的真空度测量方法对气体环境中的带电粒子十分敏感,会严重影响测量准确度,进而极大影响生产效率及产品质量,因此该问题是业界目前亟待解决的。针对这种特殊情况,本文分析了带电粒子及其他因素对传统测量设备的影响,选择了电容薄膜真空计作为改进对象,设计并提出使用全陶瓷规管进行电荷屏蔽的方案。通过受力分析,探讨提高传感器精度的方法：为降低温度对电容传感器的影响,在有限元分析的帮助下设计了快速加热恒温控制系统；通过小型化、模块化的设计,提出了结构简单、响应快速的真空度测量电路及温度测量与控制电路,并对其进行仿真；通过合理的单片机系统设计,提出了一整套真空度、温度测量与控制系统方案,可以实现恒温加热、测量真空度并进行相应显示。通过实验,该系统测量准确,结构简单,成本较低,易于推广,可以为国内特殊环境下低真空度测量方法的研究提供一定参考。
[Abstract]:In some special vacuum environments, such as chemical industry and pharmacy, there are a large number of charged particles and saturated water vapor. The common vacuum measurement methods are very sensitive to charged particles in gas environment, which will seriously affect the accuracy of measurement. Thus, the production efficiency and product quality are greatly affected, so this problem is urgently needed to be solved. In view of this special situation, this paper analyzes the influence of charged particles and other factors on the traditional measuring equipment. The capacitance film vacuum gauge is selected as the object of improvement, and the scheme of charge shielding using all-ceramic regulation is designed and put forward. Through the force analysis, the methods of improving the sensor precision are discussed: to reduce the influence of temperature on the capacitance sensor, With the help of finite element analysis, the fast heating constant temperature control system is designed, and through the miniaturization and modularization design, the vacuum measurement circuit and the temperature measurement and control circuit with simple structure and fast response are proposed and simulated. Through the reasonable design of single-chip microcomputer system, a whole set of vacuum, temperature measurement and control system scheme is put forward, which can realize constant temperature heating, measure vacuum degree and display it accordingly. Through experiments, the system is accurate in measurement and simple in structure. It is easy to be popularized and can be used as a reference for the research of low vacuum measurement method in domestic special environment.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ024

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