精密金刚石环线切割关键技术研究

发布时间：2018-03-15 06:16

本文选题：硬脆材料　切入点：脆塑转变　出处：《中原工学院》2017年硕士论文　论文类型：学位论文

【摘要】：硬脆材料加工的高精度零部件在设备上起着重要作用,硬脆材料属于难加工材料,而切割作为材料加工制作第一道工序,其质量好坏影响后续的工序进程,甚至影响产品最终使用寿命。针对硬脆材料高质量、高效率及低损耗切割要求,开展了硬脆材料精密切割加工技术研究。论文的硬脆材料切割机理研究依据脆性断裂力学为基础,通过压痕试验裂纹生长过程,证明了硬脆性材料在一定条件下可实现塑性去除,并讨论脆塑转变临界条件。根据金刚石线颗粒形状、大小及分布特点,建立了硬脆材料金刚石线切割几何模型,计算了金刚石线截面不同位置单颗粒平均切削深度及单颗粒实际切削深度,并对金刚石线切割效率进行理论分析,为硬脆材料高质量、高效率切割提供理论依据。针对硬脆材料中小口径精密平面切割工艺要求,机床研发过程采用TOP-DOWN关联设计方法,提出了高精度环形金刚石线切割机HGJ-200总体设计方案,包括环形金刚石线制造工艺、切割机床的进给系统、环线切割框架、恒张力控制装置。基于Solidworks Simulation有限元分析方法,对机床关键零部件进行了静、动态特性分析,优化了机床结构,提高了机床的精度、刚度及稳定性。为了保证更高的切割精度,对机床的制造、装配及测量工艺开展较为系统的研究,整机装配过程严格执行精密超精密机床装配流程,根据机床误差分配原则,分析了环形金刚石线切割机存在的13项几何误差,采用RENISHAW XL-80激光干涉仪等测量方法,对机床各移动副及切割框架精度进行测量和调试。切割装备研制完成后,对硬脆材料切割开展一系列切割工艺试验,通过正交试验设计及灰色关联理论分析方法,得出切割不同工艺参数对KDP晶体切割后的表面粗糙度、平面度及崩边大小影响规律,选择最优工艺参数进行试验后,KDP晶体切割质量Ra为0.94μm和平面度为11μm;崩边大小受环线线速度影响显著,在线速度50m/s以内,机床切割稳定性好。工件平台增加了旋转装置,在对于硬脆材料圆棒料切割上,切割质量及切割效率明显得到改观。在工件不同切割模式下,研究了不同粒度金刚石线的切割特性与使用寿命,并得出0.7mm电镀金刚石线切割Nd:YAG晶体总厚度偏差TTV30μm。
[Abstract]:The high precision parts of hard and brittle materials play an important role in the equipment. Hard and brittle materials are difficult to be machined. As the first process of material processing, the quality of cutting affects the process of subsequent processes. Even affect the final service life of the product. For hard and brittle materials of high quality, high efficiency and low loss cutting requirements, The cutting mechanism of hard brittle material is studied based on brittle fracture mechanics, and the crack growth process is tested by indentation test. The plastic removal of hard brittle materials can be realized under certain conditions, and the critical condition of brittle plastic transition is discussed. According to the shape, size and distribution of diamond grain, a geometric model of diamond wire cutting for hard brittle materials is established. The average cutting depth of single particle and the actual cutting depth of single particle in different positions of diamond line section are calculated, and the theoretical analysis of diamond wire cutting efficiency is carried out, which is a hard and brittle material with high quality. High efficiency cutting provides theoretical basis. According to the technological requirements of medium and small diameter precision plane cutting of hard and brittle materials, the TOP-DOWN correlation design method is adopted in the research and development of machine tools, and the overall design scheme of HGJ-200 for high precision ring diamond wire cutting machine is put forward. It includes ring diamond wire manufacturing technology, feed system of cutting machine tool, ring wire cutting frame, constant tension control device. Based on Solidworks Simulation finite element analysis method, the static and dynamic characteristics of key parts of machine tool are analyzed. The structure of the machine is optimized, and the precision, stiffness and stability of the machine are improved. In order to ensure higher cutting accuracy, the manufacture, assembly and measuring technology of the machine tool are studied systematically. The assembly process of precision ultra-precision machine tool is strictly carried out in the whole assembly process. According to the principle of error distribution of the machine tool, the 13 geometric errors of ring diamond wire cutting machine are analyzed, and the measuring methods such as RENISHAW XL-80 laser interferometer are used. The precision of each moving pair and cutting frame of machine tool was measured and debugged. After the development of cutting equipment, a series of cutting process tests were carried out on hard and brittle materials, and the orthogonal test design and grey correlation theory analysis method were adopted. The effects of different cutting parameters on the surface roughness, planeness and flanging size of KDP crystal are obtained. The cutting quality of KDP crystal is 0.94 渭 m and the planeness is 11 渭 m after the optimum technological parameters are selected for the experiment, the size of the caving edge is significantly affected by the loop velocity, the on-line speed is less than 50 m / s, and the cutting stability of the machine tool is good. The cutting quality and cutting efficiency of hard and brittle round bar material are improved obviously. The cutting characteristics and service life of diamond wire with different grain size are studied under different cutting modes of workpiece. The total thickness deviation of 0.7 mm electroplated diamond wire cut Nd:YAG crystal is obtained by TTV30 渭 m.
【学位授予单位】：中原工学院
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TQ163

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