LTCC基板用堇青石微晶玻璃的制备与流延工艺研究

发布时间：2018-03-31 21:17

  本文选题：低温共烧陶瓷　切入点：堇青石　出处：《郑州大学》2015年硕士论文

【摘要】：低温共烧陶瓷(LTCC,Low Temperature Cofired Ceramics)技术是电子封装领域中发展最快,优势最明显的一个分支,作为此技术的核心部分,LTCC基板材料的研究始终得到众多研究者的关注。而在众多的材料体系中,微晶玻璃体系以其性能的可调控性与良好的热稳定性受到广泛关注。本论文选用非化学计量比的堇青石微晶玻璃为研究对象,以Mg F2、Ti O2、P2O5、Ce O2为晶核剂,用烧结法制备堇青石微晶玻璃。采用差热分析、X射线衍射、扫描电子显微镜、热膨胀系数测试、阻抗分析等现代先进材料研究与表征方法,系统研究了烧结温度与Mg F2的加入量对微晶玻璃的析晶特性、相组成与相转变、烧结特性、热膨胀系数、介电常数与介电损耗的影响,详细探究了晶核剂Ti O2、P2O5、Ce O2对材料析晶特性及相转变的影响,对流延工艺进行了一定的探究结果表明:F的引入大幅降低了体系的玻璃化转变温度与析晶峰值温度,能够在较低温度下烧结致密化,并促进α堇青石的析出。单纯通过提高烧结温度也可以起到同样的效果。F的引入能通过影响体系析晶的种类和数量而影响微晶玻璃的热膨胀系数,烧结温度则可以影响堇青石的结晶性进而影响其热膨胀系数,所以通过改变F的含量与烧结温度可以实现热膨胀系数在一定范围内的调整。样品的介电性能受晶相组成及烧结致密程度的影响,含F量过大时会导致介电损耗激增。Mg F2添加量为8 wt%的样品可以在850℃下实现烧结致密化,热膨胀系数为3.48×10-6 K-1(25-600℃),介电常数为5.2,介电损耗为0.0032,有望用于低温共烧陶瓷基板材料。详细探究了晶核剂Ti O2、P2O5、Ce O2对材料析晶特性及相转变的影响。结果表明少量Ti O2或Ce O2的引入有助于α堇青石的析出,过多时则会抑制α堇青石的析出。掺1 wt%Ti O2或Ce O2的样品热膨胀系数小,与硅匹配,介电性能也在合适范围内,有望用于LTCC电路基板材料。而P2O5的加入不利于α堇青石的析出,且样品介电损耗过大,不适合用于电子封装领域。堇青石玻璃粉体含量为24 vol%,分散剂添加量为玻璃粉体质量的2 wt%时,浆料的粘度合适,均匀稳定,有利于涂布成膜。烧结后生带平面方向收缩率13.2%,导热系数为2.1 W/m·K,各项性能与国外主流产品性能接近,有望用于LTCC基板材料。
[Abstract]:LTCC low Temperature Cofired Ceramics (LTCC) technology is one of the fastest growing and most obvious branches in the field of electronic packaging. As the core part of this technology, the research of LTCC substrate materials has always been paid attention to by many researchers.Among the many material systems, glass-ceramics has attracted much attention for its controllable properties and good thermal stability.In this paper, cordierite glass-ceramics with non-stoichiometric ratio were selected as the research object, and the cordierite glass-ceramics were prepared by sintering with MgF _ 2O _ 2O _ 2O _ 2P _ 2O _ 5C _ 2O _ 2 as the nucleating agent.By means of differential thermal analysis (DTA) X-ray diffraction, scanning electron microscope (SEM), thermal expansion coefficient test, impedance analysis and other modern advanced material research and characterization methods, the crystallization characteristics of glass-ceramics with sintering temperature and mg F2 content were systematically studied.The effects of phase composition and phase transition, sintering characteristics, thermal expansion coefficient, dielectric constant and dielectric loss on the crystallization characteristics and phase transition of the materials were investigated in detail.The same effect can be achieved by increasing the sintering temperature. The introduction of F can influence the thermal expansion coefficient of glass-ceramics by influencing the type and quantity of crystallization.The crystallization of cordierite and the coefficient of thermal expansion can be affected by sintering temperature, so the coefficient of thermal expansion can be adjusted in a certain range by changing the content of F and sintering temperature.The dielectric properties of the samples are affected by the crystal phase composition and the sintering densification degree. When the content of F is too high, the dielectric loss of the sample with 8 wt% mg F2 can be sintered densified at 850 鈩，

本文编号：1692478