改良西门子法生产多晶硅的还原工艺研究

发布时间：2018-05-05 17:20

  本文选题：改良西门子法 + 多晶硅　； 参考：《现代化工》2017年12期

【摘要】：改进多晶硅还原炉生产工艺,操作压力由0.05~0.1 MPa提高到0.5 MPa,控制合适的温度、供料量和配比,获得了综合性能优良的生产工艺。综合指标最优的实验炉次,生产周期由200 h缩短到100 h,电单耗由150 k Wh/kg降低到73.8 k Wh/kg;产品表观质量和纯度也得到显著提升。
[Abstract]:The production process of polysilicon reduction furnace was improved, the operating pressure was increased from 0.05 MPa to 0.5 MPa, the suitable temperature, feed quantity and ratio were controlled, and the production process with good comprehensive properties was obtained. The production cycle was shortened from 200h to 100h, the unit power consumption was reduced from 150k Wh/kg to 73.8k / kg, and the apparent quality and purity of the product were improved significantly.
【作者单位】： 乐山职业技术学院;四川新光硅业科技有限责任公司;
【分类号】：TQ127.2
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本文编号：1848610