超薄304不锈钢片Roll-to-Roll固结磨料化学机械抛光辊研制

发布时间：2018-05-17 00:45

本文选题：柔性显示 + 化学机械抛光　；参考：《河南工业大学》2015年硕士论文

【摘要】：柔性显示技术正在逐步改善着人们的生活和通信,并显著促进信息可视化。柔性显示技术建立在柔性衬底之上,柔性衬底的选择对柔性器件许多特性的好坏有着直接的影响。柔性衬底材料目前主要有金属箔片、聚合物衬底、超薄玻璃以及石墨烯。其中不锈钢以其良好的耐腐蚀性和共有的金属特性,已经得到了广泛关注,也开始应用于柔性显示,不过其缺点就是表面粗糙度(Ra)较高,采用目前最受认可的化学机械抛光技术,以此达到全局平坦化无损伤的目的。由于传统的化学机械抛光技术使用游离磨料,存在材料去除率低、磨料不均匀、耗材成本高等很多缺点,人们在逐步改进传统化学机械抛光技术的同时,也在研究与探索新的平坦化技术。固结磨料化学机械抛光技术是在传统化学机械抛光技术基础之上发展起来的一种新型平坦化技术,由于具有很多优点,有望在不久的将来取代传统化学机械抛光技术。经过查阅有关文献资料,还没有关于304不锈钢片固结磨料化学机械抛光辊方面的文献资料报告,而抛光辊是CMP过程中的重要部件,它的好坏将直接影响CMP的成本。因此,本文提出了超薄304不锈钢片固结磨料化学机械抛光辊研究的课题,为超薄不锈钢片固结磨料化学机械抛光理论与技术研究提供了参考依据。本文的主要研究内容如下:1.本文以超净实验室为环境基础,通过对抛光垫的研究,把传统的抛光辊和抛光垫结合在了一起,提出了新式固结磨料化学机械抛光辊的研究。2.根据固结磨料化学机械抛光辊外层成分分析,通过实验,研究了固结磨料抛光垫UV光固化制备工艺与技术,得出了UV光固化固结磨料抛光垫的光固化工艺参数。实验结果表明:当光照距离为25mm,光照时间为90s时,固化效果最佳。3.由于本实验中抛光辊的制备需要光固化,而实验室原有的手提式UV光固化机无法满足要求,所以作者对光固化机进行了新的设计。该光固化机具有距离调节装置、保护装置,散热装置,旋转装置等,使得光固化机更加智能化,安全性得到了提高,同时相比市场上的大型光固化机,节约了成本,满足了实验要求。研究结果表明,固结磨料化学机械抛光的材料去除率明显高于游离磨料化学机械抛光,磨料可以重复使用,对环境污染小,是非常有前景的平坦化技术,固结磨料化学机械抛光辊的使用有效提高了材料去除率和表面质量。
[Abstract]:Flexible display technology is gradually improving people's life and communication, and significantly promoting information visualization. Flexible display technology is based on flexible substrate, and the choice of flexible substrate has a direct impact on many characteristics of flexible devices. Flexible substrate materials are mainly metal foil, polymer substrate, ultrathin glass and graphene. Stainless steel has been widely concerned for its good corrosion resistance and common metal properties, and has been applied to flexible display. However, its disadvantage is that the surface roughness is relatively high. The most recognized chemical mechanical polishing technology is adopted to achieve the goal of global planarization without damage. Because the traditional chemical mechanical polishing technology uses free abrasive, there are many shortcomings, such as low material removal rate, uneven abrasive, high cost of consumables and so on, so people are gradually improving the traditional chemical mechanical polishing technology at the same time. New flatting techniques are also being studied and explored. Consolidation abrasive chemical mechanical polishing (CMA) is a new planarization technology developed on the basis of traditional CMA technology. Due to its many advantages, it is expected to replace the traditional CMA technology in the near future. There is no literature report on the chemical mechanical polishing roll of 304 stainless steel sheet consolidation abrasive, which is an important part in the CMP process, and its quality will directly affect the cost of CMP. Therefore, this paper puts forward the research topic of the chemical mechanical polishing roller for the ultra-thin 304 stainless steel sheet consolidation abrasive, which provides a reference for the theoretical and technical research of the ultra-thin stainless steel sheet consolidation abrasive chemical mechanical polishing. The main contents of this paper are as follows: 1. Based on the environment of super clean laboratory, the traditional polishing roller and polishing pad are combined by the research of polishing pad, and a new type of chemical and mechanical polishing roller for consolidation abrasive is put forward in this paper. According to the composition analysis of the chemical mechanical polishing roller for the consolidation abrasive, the UV curing process and technology of the UV curing abrasive polishing pad were studied through experiments, and the UV curing process parameters of the UV light solidified abrasive polishing pad were obtained. The results showed that when the illumination distance was 25 mm and the illumination time was 90 s, the curing effect was the best. 3. In this experiment, the preparation of polishing roller needs light curing, but the original portable UV curing machine can not meet the requirements, so the author has carried out a new design for the light curing machine. The light curing machine is equipped with a range adjusting device, a protective device, a heat dissipation device, a rotating device, etc., which makes the light curing machine more intelligent and more secure. At the same time, compared with the large-scale light curing machine on the market, it saves the cost. The experimental requirements are satisfied. The results show that the material removal rate of chemical-mechanical polishing of consolidated abrasive is obviously higher than that of free abrasive, the abrasive can be reused, and the pollution to the environment is small, so it is a very promising flatting technology. The use of chemical-mechanical polishing roller for consolidation abrasive can effectively improve the material removal rate and surface quality.
【学位授予单位】：河南工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ050.6

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