飞秒激光加工蓝宝石超衍射纳米结构

发布时间：2018-03-07 19:02

本文选题：飞秒激光加工　切入点：光学衍射极限　出处：《物理学报》2017年14期 　论文类型：期刊论文

【摘要】：蓝宝石具有超强硬度及耐腐蚀、耐高温、在紫外-红外波段具有良好的透光性等优点,在军工业以及医疗器械方面具有广泛的应用前景.然而这些优点又对蓝宝石的机械加工或化学腐蚀加工带来困难.飞秒激光脉冲具有热损伤小、加工分辨率高、材料选择广等特点,被广泛应用于固体材料改性和高精度三维微纳器件加工.本文提出了利用飞秒激光多光子吸收特性在蓝宝石表面实现超越光学衍射极限的精细加工.利用聚焦后的波长为343 nm的飞秒激光,配合高精密三维压电位移台,实现激光焦点和蓝宝石晶体的相对三维移动,在蓝宝石晶体衬底上进行精确扫描,得到了线宽约61 nm的纳米线,纳米线间的最小间距达到142 nm左右.利用等离子体模型解释了加工得到的纳米条纹的产生原因,研究了激光功率、扫描速度对加工分辨率的影响.最终本工作实现了超越光学衍射极限的加工精度,为实现利用飞秒激光对高硬度材料的微纳结构制备提供了参考.
[Abstract]:Sapphire with super hardness and corrosion resistance, high temperature resistance, has such advantages as good light transmittance in ultraviolet and infrared wavelengths, and has wide application prospect in the military industrial and medical devices. However, these advantages of sapphire mechanical or chemical etching processing difficult. Femtosecond laser pulse has less thermal damage, processing high resolution, wide material selection and other characteristics, are widely used in solid material modification and high precision three-dimensional micro nano processing. This paper proposes absorption characteristics of fine processing beyond the optical diffraction limit on the sapphire surface using femtosecond laser. Using multiphoton after focusing femtosecond laser wavelength is 343 nm, with a high precision three-dimensional pressure electric displacement, relative movement to achieve three-dimensional laser focus and sapphire crystal, precise scan on sapphire crystal substrate, nanowires have linewidth of about 61 NM The minimum distance between the nanowires, reaching about 142 nm. The plasma model explain the causes of the processed nano stripes, the effects of laser power, influence of scanning speed on machining resolution. Finally the realization of the machining accuracy beyond the optical diffraction limit, for the realization of high hardness materials, micro nano structure preparation provides a reference by femtosecond laser.

【作者单位】：吉林大学电子科学与工程学院;
【基金】：国家自然科学基金(批准号:61590930,91323301,61435005,21473076)资助的课题~~
【分类号】：TN249;TQ163

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