提纯三氯氢硅精馏系统的仿真与设计

发布时间：2018-03-29 08:02

本文选题：三氯氢硅　切入点：精馏　出处：《北京化工大学》2015年硕士论文

【摘要】：三氯氢硅广泛应用于多晶硅,单晶硅,化学气相沉淀、电子气等产品的制造,在实际生产中存在着产品杂质含量较高,能耗较大的问题。本文为达到三氯氢硅纯度的要求,提高提纯工艺效率,在三氯氢硅纯度达到要求的基础上,降低生产能耗,分为三步进行。本文介绍了三氯氢硅的性质、生产原理以及反映的催化机理,介绍了填料的分类、性质及其各自的应用。填料流体力学性能和传质性能的计算。本文对三氯氢硅精馏塔设备进行了设计和理论计算,并通过aspen plus计算软件,对三氯氢硅精馏过程进行了计算机模拟与优化,对精馏塔的操作弹性进行改良,达到在工业应用上提高三氯氢硅纯度,降低能耗的要求。依据设计要求和模拟的数据结果,对精馏塔的尺寸进行了设计。对各个操作参数和规程进行了规定。在实际生产中对设计结果进行了验证,满足原定的对三氯氢硅纯度的质量要求。
[Abstract]:Trichlorohydrosilicon is widely used in the manufacture of polysilicon, monocrystalline silicon, chemical vapor precipitation, electronic gas and so on. On the basis of improving the purification process efficiency and reducing the production energy consumption on the basis of the purity of trichlorosilicon to meet the requirements, it is divided into three steps. In this paper, the properties, production principle and reaction catalytic mechanism of trichlorosilane are introduced, and the classification of fillers is introduced. Properties and their respective applications. Calculation of hydrodynamic properties and mass transfer properties of fillers. The design and theoretical calculation of trichlorosilicon distillation column equipment were carried out, and the calculation software aspen plus was used. The distillation process of trichlorosilane was simulated and optimized by computer. The operating elasticity of the distillation column was improved to meet the requirements of increasing the purity of trichlorosilicon and reducing the energy consumption in industrial application. According to the design requirements and the simulated data results, The size of the distillation column was designed and the operation parameters and procedures were specified. The design results were verified in actual production to meet the original quality requirements for the purity of trichlorosilicon.
【学位授予单位】：北京化工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ127.2

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