红外紫外双截止玻璃镀膜

发布时间：2018-04-29 18:14

本文选题：磁控溅射 + 双截止镀膜　；参考：《海南大学》2017年硕士论文

【摘要】：环境恶化的问题随着人类的发展日益凸显,臭氧层破坏,能源短缺问题也随之加剧,普通玻璃使大量太阳辐射进入室内,其红外辐射使室温升高,增加空调系统能耗,紫外辐射使物品加速老化,伤害人体。因而人们希望玻璃能透过可见光的同时阻隔掉紫外和红外辐射,所以能够实现反射红外辐射同时阻隔紫外线的玻璃是建筑玻璃发展的必然趋势,也引起广大研究者的关注。目前国内多功能玻璃多数采用贴膜方式生产来实现其功能性,其成本高昂,且易老化、不耐磨,不利于产品的普及应用。本文在正交实验设计的基础上,采用反应磁控共溅射的方法,以铈、锡纯金属靶作为粒子源,分别以氩气和氧气作为工作气体和反应气体,研究了铈(Ce)靶溅射功率、锡(Sn)靶溅射功率、工作气体流量、氩氧流量比、工作气压五个因素对薄膜紫外防护性能及可见光透过性能的影响。制备了 Ce-Sn-O防紫外薄膜,获得了优异的紫外防护性能,且保持了较高的可见光透过率,能够保证日常采光。其紫外光透过为仅为2.33%,可见光透过率仍保持在80%以上。通过控制变量的方法研究了氩氧流量比和锡(Sn)靶溅射功率对薄膜微观结构及光学性能的影响,并利用扫描电子显微镜(SEM)、X射线衍射(XRD)、透射电子显微镜(TEM)和X射线光电子能谱(XPS)等测试手段对薄膜的结构、表面形貌及成分进行分析和表征。采用在正交试验中获得的最优水平组合为工艺参数,以自制FTO玻璃为溅射衬底,制备了 Ce-Sn-O/FTO复合双截止镀膜玻璃。获得了较好的红外紫外截止性能,通过对其光学性能的研究发现复合薄膜的紫外及可见光透过率取决于在此波段透过率较低的膜层的性能。此外,对比研究了 FTO薄膜和Ce-Sn-O/FTO复合薄膜的结合力性能。将FTO膜作为底膜,Ce-Sn-O膜作为顶膜能有效的提高FTO膜的耐刮擦性能,获得了具有优异实用性的红外紫外双截止玻璃。玻璃。能够反射90%以上的红外辐射,可见光透过率为71.38%,紫外光透过率为5.1%。
[Abstract]:With the development of human beings, the problem of environmental deterioration is becoming more and more prominent, the ozone layer is destroyed, and the energy shortage is aggravated. Ordinary glass makes a large amount of solar radiation into the room, and the infrared radiation increases the room temperature and increases the energy consumption of air conditioning system. Ultraviolet radiation accelerates the aging of objects and harms the human body. Therefore, people hope that glass can block ultraviolet and infrared radiation while passing through visible light, so the glass which can reflect infrared radiation and block ultraviolet radiation is the inevitable trend of the development of building glass, and it has also attracted the attention of researchers. At present, the multifunctional glass is produced by film sticking method in our country, which is costly, easy to aging and not wear-resistant, which is not conducive to the popularization and application of products. On the basis of orthogonal experimental design, the sputtering power of cerium target was studied by reactive magnetron co-sputtering method, using cerium and tin pure metal target as particle source, argon and oxygen as working gas and reaction gas, respectively. The effects of sputtering power, working gas flow rate, argon / oxygen flow ratio and working pressure on the UV protection and visible light transmission of the thin films were investigated. The Ce-Sn-O anti-UV film was prepared, and the excellent UV protection performance was obtained, and the high visible light transmittance was maintained, which can guarantee the daily lighting. The UV transmittance is only 2.33 and the visible light transmittance remains above 80%. The effects of argon / oxygen flow ratio and sputtering power on the microstructure and optical properties of the films were investigated by means of variable control. The structure, surface morphology and composition of the films were characterized by means of scanning electron microscopy (SEM), transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS). Using the optimum horizontal combination obtained in the orthogonal experiment as the technological parameter, the Ce-Sn-O/FTO composite double-cut coating glass was prepared by using self-made FTO glass as sputtering substrate. The optical properties of the composite films are studied. It is found that the UV and visible transmittance of the composite films depend on the properties of the films with low transmittance in this band. In addition, the adhesion properties of FTO films and Ce-Sn-O/FTO composite films were compared and studied. Ce-Sn-O film with FTO as base film can effectively improve the scratch resistance of FTO film and obtain infrared UV double cut glass with excellent practicability. Glass. The infrared radiation can reflect more than 90% of the infrared radiation, the transmittance of visible light is 71.38 and the transmittance of ultraviolet light is 5.1.
【学位授予单位】：海南大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TQ171.724

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